Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection

INIS

• accuracy 8%
• actuators 8%
• architecture 16%
• atomic force microscopy 8%
• beams 8%
• compacts 8%
• inspection 100%
• khz range 8%
• masks 8%
• mechanical vibrations 8%
• metrology 8%
• mhz range 8%
• microscopes 100%
• monitoring 8%
• motion 8%
• noise 16%
• one-dimensional calculations 8%
• operation 8%
• positioning 41%
• probes 100%
• range 8%
• resonance 8%
• semiconductor materials 8%
• size 8%
• spectra 8%
• speed 100%
• stiffness 8%
• substrates 100%
• surfaces 16%
• travel 8%
• units 41%
• width 8%

Engineering

• Area Substrate 100%
• Atmospheric Aerosol 20%
• Atomic Force Microscope 10%
• Beam Deflection 10%
• Development 100%
• Flexure 20%
• Large Area 100%
• Mechanical Vibration 10%
• One Dimensional 10%
• Resonance Frequency 10%
• Semiconductor 10%
• Stages 30%
• Substrate Surface 10%
• Substrates 10%
• Throughput 10%