Fingerprint
Dive into the research topics of 'Diffraction grating parameter retrieval using non-paraxial structured beams in coherent Fourier scatterometry'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Diffraction grating parameter retrieval using non-paraxial structured beams in coherent Fourier scatterometry
S. Soman*, S. F. Pereira, O. El Gawhary
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
1
Citation
(Scopus)
53
Downloads
(Pure)