Direct detection of polystyrene equivalent nanoparticles with a diameter of 21 nm (∼λ/19) using coherent Fourier scatterometry

D. Kolenov*, I. E. Zadeh, R. C. Horsten, S. F. Pereira

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)
30 Downloads (Pure)

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Physics & Astronomy