Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 2073-2079 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
Volume | 26 |
Issue number | 6 |
Publication status | Published - 2008 |
Keywords
- CWTS 0.75 <= JFIS < 2.00