Efficient residual stress identification approach for MEMS using modal information

R. J. Dedden, L. Iapichino, P. Tiso, J. F.L. Goosen, F. Van Keulen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

Residual stresses are common in Micro Electro Mechanical System (MEMS) membrane structures. Experimental assessment of these stresses can provide valuable information on the production process. In general, experimental stress assessment for MEMS is challenging due to the limited possibilities for non-destructive testing. This work investigates the use of dynamic modal data to identify the residual stress state. In view of the computational feasibility, the focus is on two aspects: 1) A method is proposed that expresses the unknown stress field as a combination of few, carefully selected stress modes. An optimization algorithm is deemed to identify the amplitudes of such modes. 2) A meta-model is constructed using the empirical interpolation method (EIM), to facilitate a fast evaluation of the iterations.

Original languageEnglish
Title of host publicationProceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics
EditorsP Sas, D Moens, A Van de Walle
PublisherKU Leuven, Departement Werktuigkunde
Pages2169-2181
ISBN (Electronic)9789073802940
Publication statusPublished - 2016
Event27th International Conference on Noise and Vibration Engineering and International Conference on Uncertainty in Structural Dynamics - Leuven, Belgium
Duration: 19 Sep 201621 Sep 2016
https://www.mech.kuleuven.be/en/pma/events/isma-2016

Conference

Conference27th International Conference on Noise and Vibration Engineering and International Conference on Uncertainty in Structural Dynamics
Abbreviated titleISMA 2016 and USD2016
CountryBelgium
CityLeuven
Period19/09/1621/09/16
Internet address

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