Efficient residual stress identification approach for MEMS using modal information

R. J. Dedden; L. Iapichino; P. Tiso; J. F.L. Goosen; F. Van Keulen

Efficient residual stress identification approach for MEMS using modal information

R. J. Dedden, L. Iapichino, P. Tiso, J. F.L. Goosen, F. Van Keulen

Computational Design and Mechanics

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Abstract

Residual stresses are common in Micro Electro Mechanical System (MEMS) membrane structures. Experimental assessment of these stresses can provide valuable information on the production process. In general, experimental stress assessment for MEMS is challenging due to the limited possibilities for non-destructive testing. This work investigates the use of dynamic modal data to identify the residual stress state. In view of the computational feasibility, the focus is on two aspects: 1) A method is proposed that expresses the unknown stress field as a combination of few, carefully selected stress modes. An optimization algorithm is deemed to identify the amplitudes of such modes. 2) A meta-model is constructed using the empirical interpolation method (EIM), to facilitate a fast evaluation of the iterations.

Original language	English
Title of host publication	Proceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics
Editors	P Sas, D Moens, A Van de Walle
Publisher	KU Leuven, Departement Werktuigkunde
Pages	2169-2181
ISBN (Electronic)	9789073802940
Publication status	Published - 2016
Event	27th International Conference on Noise and Vibration Engineering and International Conference on Uncertainty in Structural Dynamics - Leuven, Belgium Duration: 19 Sept 2016 → 21 Sept 2016 https://www.mech.kuleuven.be/en/pma/events/isma-2016

Conference

Conference	27th International Conference on Noise and Vibration Engineering and International Conference on Uncertainty in Structural Dynamics
Abbreviated title	ISMA 2016 and USD2016
Country/Territory	Belgium
City	Leuven
Period	19/09/16 → 21/09/16
Internet address	https://www.mech.kuleuven.be/en/pma/events/isma-2016

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Dedden, R. J., Iapichino, L., Tiso, P., Goosen, J. F. L., & Van Keulen, F. (2016). Efficient residual stress identification approach for MEMS using modal information. In P. Sas, D. Moens, & A. Van de Walle (Eds.), Proceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics (pp. 2169-2181). KU Leuven, Departement Werktuigkunde.

Dedden, R. J. ; Iapichino, L. ; Tiso, P. et al. / Efficient residual stress identification approach for MEMS using modal information. Proceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics. editor / P Sas ; D Moens ; A Van de Walle. KU Leuven, Departement Werktuigkunde, 2016. pp. 2169-2181

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title = "Efficient residual stress identification approach for MEMS using modal information",

abstract = "Residual stresses are common in Micro Electro Mechanical System (MEMS) membrane structures. Experimental assessment of these stresses can provide valuable information on the production process. In general, experimental stress assessment for MEMS is challenging due to the limited possibilities for non-destructive testing. This work investigates the use of dynamic modal data to identify the residual stress state. In view of the computational feasibility, the focus is on two aspects: 1) A method is proposed that expresses the unknown stress field as a combination of few, carefully selected stress modes. An optimization algorithm is deemed to identify the amplitudes of such modes. 2) A meta-model is constructed using the empirical interpolation method (EIM), to facilitate a fast evaluation of the iterations.",

author = "Dedden, {R. J.} and L. Iapichino and P. Tiso and Goosen, {J. F.L.} and {Van Keulen}, F.",

year = "2016",

language = "English",

pages = "2169--2181",

editor = "P Sas and D Moens and {Van de Walle}, A",

booktitle = "Proceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics",

publisher = "KU Leuven, Departement Werktuigkunde",

note = "27th International Conference on Noise and Vibration Engineering and International Conference on Uncertainty in Structural Dynamics, ISMA 2016 and USD2016 ; Conference date: 19-09-2016 Through 21-09-2016",

url = "https://www.mech.kuleuven.be/en/pma/events/isma-2016",

}

Dedden, RJ, Iapichino, L, Tiso, P, Goosen, JFL & Van Keulen, F 2016, Efficient residual stress identification approach for MEMS using modal information. in P Sas, D Moens & A Van de Walle (eds), Proceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics. KU Leuven, Departement Werktuigkunde, pp. 2169-2181, 27th International Conference on Noise and Vibration Engineering and International Conference on Uncertainty in Structural Dynamics, Leuven, Belgium, 19/09/16.

Efficient residual stress identification approach for MEMS using modal information. / Dedden, R. J.; Iapichino, L.; Tiso, P. et al.
Proceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics. ed. / P Sas; D Moens; A Van de Walle. KU Leuven, Departement Werktuigkunde, 2016. p. 2169-2181.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Dedden, R. J.

AU - Iapichino, L.

AU - Tiso, P.

AU - Goosen, J. F.L.

AU - Van Keulen, F.

PY - 2016

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N2 - Residual stresses are common in Micro Electro Mechanical System (MEMS) membrane structures. Experimental assessment of these stresses can provide valuable information on the production process. In general, experimental stress assessment for MEMS is challenging due to the limited possibilities for non-destructive testing. This work investigates the use of dynamic modal data to identify the residual stress state. In view of the computational feasibility, the focus is on two aspects: 1) A method is proposed that expresses the unknown stress field as a combination of few, carefully selected stress modes. An optimization algorithm is deemed to identify the amplitudes of such modes. 2) A meta-model is constructed using the empirical interpolation method (EIM), to facilitate a fast evaluation of the iterations.

AB - Residual stresses are common in Micro Electro Mechanical System (MEMS) membrane structures. Experimental assessment of these stresses can provide valuable information on the production process. In general, experimental stress assessment for MEMS is challenging due to the limited possibilities for non-destructive testing. This work investigates the use of dynamic modal data to identify the residual stress state. In view of the computational feasibility, the focus is on two aspects: 1) A method is proposed that expresses the unknown stress field as a combination of few, carefully selected stress modes. An optimization algorithm is deemed to identify the amplitudes of such modes. 2) A meta-model is constructed using the empirical interpolation method (EIM), to facilitate a fast evaluation of the iterations.

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M3 - Conference contribution

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BT - Proceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics

A2 - Sas, P

A2 - Moens, D

A2 - Van de Walle, A

PB - KU Leuven, Departement Werktuigkunde

T2 - 27th International Conference on Noise and Vibration Engineering and International Conference on Uncertainty in Structural Dynamics

Y2 - 19 September 2016 through 21 September 2016

ER -

Dedden RJ, Iapichino L, Tiso P, Goosen JFL , Van Keulen F. Efficient residual stress identification approach for MEMS using modal information. In Sas P, Moens D, Van de Walle A, editors, Proceedings of ISMA 2016 - International Conference on Noise and Vibration Engineering and USD2016 - International Conference on Uncertainty in Structural Dynamics. KU Leuven, Departement Werktuigkunde. 2016. p. 2169-2181

Efficient residual stress identification approach for MEMS using modal information

Abstract

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