Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt(PF3)4

APJM Botman, CW Hagen, J. Li, B.L. Thiel, K.A. Dunn, JJL Mulders, S. Randolph, M. Toth

    Research output: Contribution to journalArticleScientificpeer-review

    27 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2759-2763
    Number of pages5
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume27
    Issue number6
    Publication statusPublished - 2009

    Keywords

    • CWTS JFIS < 0.75

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