Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt(PF3)4

APJM Botman, CW Hagen, J. Li, B.L. Thiel, K.A. Dunn, JJL Mulders, S. Randolph, M. Toth

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2759-2763
Number of pages	5
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	27
Issue number	6
Publication status	Published - 2009

Keywords

@article{45ff9e541dcf42bf804288c9963b9dec,

title = "Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt(PF3)4",

keywords = "CWTS JFIS < 0.75",

author = "APJM Botman and CW Hagen and J. Li and B.L. Thiel and K.A. Dunn and JJL Mulders and S. Randolph and M. Toth",

year = "2009",

language = "Undefined/Unknown",

volume = "27",

pages = "2759--2763",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt(PF3)4

AU - Botman, APJM

AU - Hagen, CW

AU - Li, J.

AU - Thiel, B.L.

AU - Dunn, K.A.

AU - Mulders, JJL

AU - Randolph, S.

AU - Toth, M.

PY - 2009

Y1 - 2009

KW - CWTS JFIS < 0.75

M3 - Article

SN - 1071-1023

VL - 27

SP - 2759

EP - 2763

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -