@inproceedings{4540a9a9a6ad48e5bc12529dec8399ed,
title = "Enhancement of AlN slender piezoelectric cantilevers actuation by PECVD silicon nitride coating",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "AT Tran and G Pandraud and H Schellevis and PM Sarro",
year = "2012",
doi = "10.1016/j.proeng.2012.09.095",
language = "English",
publisher = "Elsevier",
pages = "104--107",
editor = "R Walczak and J Dziuban",
booktitle = "Procedia Engineering - Proceedings 26th European Conference on Solid-State Transducers, EUROSENSOR 2012",
note = "Eurosensors XXVI, 9-12 September, 2012, Krak{\'o}w, Poland ; Conference date: 09-09-2012 Through 12-09-2012",
}