Fabrication and characterization of p-type silicon field-emitter arrays for lithography

TF Teepen, H van 't Spijker, S. Steenbrink, A van Zuuk, CTH Heerkens, N van Druten, M Wieland, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)359-369
    Number of pages11
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume23
    Issue number2
    Publication statusPublished - 2005

    Keywords

    • ZX CWTS 1.00 <= JFIS < 3.00

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