Fabrication and characterization of p-type silicon field-emitter arrays for lithography

TF Teepen, H van 't Spijker, S. Steenbrink, A van Zuuk, CTH Heerkens, N van Druten, M Wieland, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	359-369
Number of pages	11
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	23
Issue number	2
Publication status	Published - 2005

Keywords

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title = "Fabrication and characterization of p-type silicon field-emitter arrays for lithography",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "TF Teepen and {van 't Spijker}, H and S. Steenbrink and Zuuk, {A van} and CTH Heerkens and {van Druten}, N and M Wieland and P Kruit",

year = "2005",

language = "Undefined/Unknown",

volume = "23",

pages = "359--369",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Fabrication and characterization of p-type silicon field-emitter arrays for lithography

AU - Teepen, TF

AU - van 't Spijker, H

AU - Steenbrink, S.

AU - Zuuk, A van

AU - Heerkens, CTH

AU - van Druten, N

AU - Wieland, M

AU - Kruit, P

PY - 2005

Y1 - 2005

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 1071-1023

VL - 23

SP - 359

EP - 369

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 2

ER -