Fabrication and characterization of silicon carbide field-emitter array

A van Zuuk, C.Th.H. Heerkens, AHV van Veen, T.F. Teepen, MJJ Wieland, O. Groening, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	106-110
Number of pages	5
Journal	Microelectronic Engineering
Volume	73-74
Publication status	Published - 2004

Keywords

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title = "Fabrication and characterization of silicon carbide field-emitter array",

keywords = "ZX CWTS JFIS < 1.00",

author = "Zuuk, {A van} and C.Th.H. Heerkens and {van Veen}, AHV and T.F. Teepen and MJJ Wieland and O. Groening and P Kruit",

year = "2004",

language = "Undefined/Unknown",

volume = "73-74",

pages = "106--110",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Fabrication and characterization of silicon carbide field-emitter array

AU - Zuuk, A van

AU - Heerkens, C.Th.H.

AU - van Veen, AHV

AU - Teepen, T.F.

AU - Wieland, MJJ

AU - Groening, O.

AU - Kruit, P

PY - 2004

Y1 - 2004

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0167-9317

VL - 73-74

SP - 106

EP - 110

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -