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Fabrication of Al-based superconducting high-aspect ratio TSVs for quantum 3D integration
Juan Alfaro Barrantes, Max Mastrangeli, David Thoen, Juan Bueno Lopez, Jochem Baselmans, Lina Sarro
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3
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(Scopus)
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