Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

AT Tran, G Pandraud, H Schellevis, T Alan, V Aravindh, O Wunnicke, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

6 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings Eurosensors XXV, September 4-7, 2011, Athens, Greece
EditorsC Tsamis, G Kaltas
Place of PublicationAthens, Greece
PublisherElsevier
Pages673-676
Number of pages4
DOIs
Publication statusPublished - 2011
EventEurosensors XXV - Athens, Greece
Duration: 4 Sep 20117 Sep 2011

Publication series

Name
PublisherElsevier
NameProcedia Engineering
Volume25
ISSN (Print)1877-7058

Conference

ConferenceEurosensors XXV
Period4/09/117/09/11

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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