Focused Electron Beam Induced Deposition of 1,1-dichloro-1-silacyclohexane, silacyclohexane and 1,3,5-trisilacyclohexane; preliminary study on the role of low energy secondary electrons in the deposition process

O Ingolfsson, R Kumar, CW Hagen, S Hari

Research output: Contribution to journalConference articleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)1-1
Number of pages1
JournalJournal of Physics: Conference Series
Volume635
Issue numberart.nr. 072088
DOIs
Publication statusPublished - 2015

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