Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies

HW van Zeijl, JHCM Slabbekoorn, LK Nanver, PWL van Dijk, T Machielsen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationSAFE-ProRISC-SeSens 2000: proceedings
Editors JP Veen
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Number of pages5
ISBN (Print)90-73461-24-3
Publication statusPublished - 2000

Publication series

PublisherSTW technology foundation


  • ZX Int.klas.verslagjaar < 2002

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