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Functional materials for MEMS based gas sensors
M. Ramachandrappa Venkatesh
Electronic Components, Technology and Materials
Research output
:
Thesis
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Dissertation (TU Delft)
62
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INIS
transducers
100%
sensors
100%
gases
100%
thin films
60%
ethanol
40%
methanol
40%
organic compounds
40%
volatility
40%
design
20%
adsorption
20%
nanoparticles
20%
vapors
20%
dielectric properties
20%
magnetic properties
20%
readout systems
20%
dielectrics
20%
stimuli
20%
detection
20%
mechanical properties
20%
chemisorption
20%
Material Science
Functional Material
100%
Gas Sensor
100%
Transducer
100%
Dielectric Property
20%
Dielectric Films
20%
Chemisorption
20%
Vapor
20%
Adsorption
20%
Electrical Resistivity
20%
Gas
20%
Sensor
20%
Chemical Engineering
Microelectromechanical System
100%
Ethanol
50%
Organic Compound
50%
Methanol
50%
Chemisorption
25%
Adsorption
25%