We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.
|Title of host publication||Proceedings 2018 IEEE Micro Electro Mechanical Systems (MEMS 2018)|
|Editors||J Ducrée, M Despont|
|Place of Publication||Piscataway, NJ, USA|
|Publication status||Published - 2018|
|Event||MEMS 2018: 31st IEEE International Conference on Micro Electro Mechanical Systems - Belfast, United Kingdom|
Duration: 21 Jan 2018 → 25 Jan 2018
|Period||21/01/18 → 25/01/18|