Graphene gas pumps

Dejan Davidovikj, Damian Bouwmeester, Herre S.J. Van Der Zant, Peter G. Steeneken*

*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
29 Downloads (Pure)


We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.

Original languageEnglish
Title of host publicationProceedings 2018 IEEE Micro Electro Mechanical Systems (MEMS 2018)
EditorsJ Ducrée, M Despont
Place of PublicationPiscataway, NJ, USA
ISBN (Electronic)9781538647820
Publication statusPublished - 2018
EventMEMS 2018: 31st IEEE International Conference on Micro Electro Mechanical Systems - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018


ConferenceMEMS 2018
Country/TerritoryUnited Kingdom
Internet address

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.


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