Growth behaviour near the ultimate resolution of nanometer-scale focused electron beam-induced deposition

WF van Dorp, CW Hagen

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    JournalNanotechnology
    Volume19
    Issue number22
    Publication statusPublished - 2008

    Keywords

    • CWTS JFIS >= 2.00

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