High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature

Bruno Lopez-Rodriguez*, Roald van der Kolk, Samarth Aggarwal, Naresh Sharma, Zizheng Li, Daniel van der Plaats, Thomas Scholte, Jin Chang, Simon Gröblacher, Silvania F. Pereira, Harish Bhaskaran, Iman Esmaeil Zadeh

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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