Influences of the capping layer on the grain growth with micro-Czochralski process during excimer-laser crystallization

M He, R Ishihara, Y Hiroshima, S Inoue, T Shimoda

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
JournalJapanese Journal of Applied Physics. Part 2, Letters & Express Lettres
Publication statusPublished - 2006


  • academic journal papers
  • CWTS JFIS < 0.75

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