Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

S Roy, N Kumar, SF Pereira, HP Urbach

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalJournal of Optics
Volume15
Issue number7
DOIs
Publication statusPublished - 2013

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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