Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement

Roumen Nojdelova, D Voigt, Arthur van de Nes, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

Abstract

In this paper we present an investigation of the main non-idealities and error sources in precision capacitive displacement sensors. The sources of errors are described quantitatively and a compensation technique is proposed. The linearity of a capacitive sensor with self-alignment feature is tested with an optical Fabry-Perot displacement Interferometer. Experimental data from the practical implementation of the compensation is presented. Two different models for guard ring gap correction are compared and verified with the experimental data. Accuracy of better than 2 nm is achieved for displacement range of 15 μm, using only two calibration points.
Original languageEnglish
Title of host publication2015 9th International Conference on Sensing Technology (ICST)
Place of PublicationPiscataway
PublisherIEEE
Pages575-580
Number of pages6
ISBN (Electronic)978-1-4799-6314-0
DOIs
Publication statusPublished - Dec 2015
Event2015 9th International Conference on Sensing Technology - Auckland, New Zealand
Duration: 8 Dec 201510 Dec 2015
http://seat.massey.ac.nz/conferences/icst2015/

Conference

Conference2015 9th International Conference on Sensing Technology
Abbreviated titleICST
CountryNew Zealand
CityAuckland
Period8/12/1510/12/15
Internet address

Keywords

  • capacitive sensor
  • displacement measurement
  • nonlinearity
  • error correction
  • sub-nanometer uncertainty

Fingerprint

Dive into the research topics of 'Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement'. Together they form a unique fingerprint.

Cite this