Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement

Roumen Nojdelova; D Voigt; Arthur van de Nes; S Nihtianov

doi:10.1109/ICSensT.2015.7438464

Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement

Roumen Nojdelova, D Voigt, Arthur van de Nes, S Nihtianov

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Abstract

In this paper we present an investigation of the main non-idealities and error sources in precision capacitive displacement sensors. The sources of errors are described quantitatively and a compensation technique is proposed. The linearity of a capacitive sensor with self-alignment feature is tested with an optical Fabry-Perot displacement Interferometer. Experimental data from the practical implementation of the compensation is presented. Two different models for guard ring gap correction are compared and verified with the experimental data. Accuracy of better than 2 nm is achieved for displacement range of 15 μm, using only two calibration points.

Original language	English
Title of host publication	2015 9th International Conference on Sensing Technology (ICST)
Place of Publication	Piscataway
Publisher	IEEE
Pages	575-580
Number of pages	6
ISBN (Electronic)	978-1-4799-6314-0
DOIs	https://doi.org/10.1109/ICSensT.2015.7438464
Publication status	Published - Dec 2015
Event	2015 9th International Conference on Sensing Technology - Auckland, New Zealand Duration: 8 Dec 2015 → 10 Dec 2015 http://seat.massey.ac.nz/conferences/icst2015/

Conference

Conference	2015 9th International Conference on Sensing Technology
Abbreviated title	ICST
Country/Territory	New Zealand
City	Auckland
Period	8/12/15 → 10/12/15
Internet address	http://seat.massey.ac.nz/conferences/icst2015/

Keywords

capacitive sensor
displacement measurement
nonlinearity
error correction
sub-nanometer uncertainty

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10.1109/ICSensT.2015.7438464

Cite this

@inproceedings{8b1a778e48ee4f138cd5decbb4c4ad00,

title = "Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement",

abstract = "In this paper we present an investigation of the main non-idealities and error sources in precision capacitive displacement sensors. The sources of errors are described quantitatively and a compensation technique is proposed. The linearity of a capacitive sensor with self-alignment feature is tested with an optical Fabry-Perot displacement Interferometer. Experimental data from the practical implementation of the compensation is presented. Two different models for guard ring gap correction are compared and verified with the experimental data. Accuracy of better than 2 nm is achieved for displacement range of 15 μm, using only two calibration points.",

keywords = "capacitive sensor, displacement measurement, nonlinearity, error correction, sub-nanometer uncertainty",

author = "Roumen Nojdelova and D Voigt and {van de Nes}, Arthur and S Nihtianov",

year = "2015",

month = dec,

doi = "10.1109/ICSensT.2015.7438464",

language = "English",

pages = "575--580",

booktitle = "2015 9th International Conference on Sensing Technology (ICST)",

publisher = "IEEE",

address = "United States",

note = "2015 9th International Conference on Sensing Technology, ICST ; Conference date: 08-12-2015 Through 10-12-2015",

url = "http://seat.massey.ac.nz/conferences/icst2015/",

}

Nojdelova, R, Voigt, D, van de Nes, A & Nihtianov, S 2015, Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement. in 2015 9th International Conference on Sensing Technology (ICST). IEEE, Piscataway, pp. 575-580, 2015 9th International Conference on Sensing Technology, Auckland, New Zealand, 8/12/15. https://doi.org/10.1109/ICSensT.2015.7438464

Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement. / Nojdelova, Roumen; Voigt, D; van de Nes, Arthur et al.
2015 9th International Conference on Sensing Technology (ICST). Piscataway: IEEE, 2015. p. 575-580.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement

AU - Nojdelova, Roumen

AU - Voigt, D

AU - van de Nes, Arthur

AU - Nihtianov, S

PY - 2015/12

Y1 - 2015/12

N2 - In this paper we present an investigation of the main non-idealities and error sources in precision capacitive displacement sensors. The sources of errors are described quantitatively and a compensation technique is proposed. The linearity of a capacitive sensor with self-alignment feature is tested with an optical Fabry-Perot displacement Interferometer. Experimental data from the practical implementation of the compensation is presented. Two different models for guard ring gap correction are compared and verified with the experimental data. Accuracy of better than 2 nm is achieved for displacement range of 15 μm, using only two calibration points.

AB - In this paper we present an investigation of the main non-idealities and error sources in precision capacitive displacement sensors. The sources of errors are described quantitatively and a compensation technique is proposed. The linearity of a capacitive sensor with self-alignment feature is tested with an optical Fabry-Perot displacement Interferometer. Experimental data from the practical implementation of the compensation is presented. Two different models for guard ring gap correction are compared and verified with the experimental data. Accuracy of better than 2 nm is achieved for displacement range of 15 μm, using only two calibration points.

KW - capacitive sensor

KW - displacement measurement

KW - nonlinearity

KW - error correction

KW - sub-nanometer uncertainty

U2 - 10.1109/ICSensT.2015.7438464

DO - 10.1109/ICSensT.2015.7438464

M3 - Conference contribution

SP - 575

EP - 580

BT - 2015 9th International Conference on Sensing Technology (ICST)

PB - IEEE

CY - Piscataway

T2 - 2015 9th International Conference on Sensing Technology

Y2 - 8 December 2015 through 10 December 2015

ER -

Investigation of error- and drift sources in a capacitive sensor system for sub-nanometer displacement measurement

Abstract

Conference

Keywords

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