Lithography system, method of clamping an wafer table

G. de Boer; MP Dansberg; P Kruit

Lithography system, method of clamping an wafer table

G. de Boer (Inventor), MP Dansberg (Inventor), P Kruit (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	US2009/0027649 A1
IPC	Heeft nieuwheidsrapport. Aanvrager: Mapper Lithography IP B.V.
Priority date	29/01/09
Publication status	Published - 2009

Bibliographical note

Heeft nieuwheidsrapport. Aanvrager: Mapper Lithography IP B.V.

Keywords

Octrooi

Cite this

@misc{ef3a604ed9ca4f0383c85eb3ef65de3a,

title = "Lithography system, method of clamping an wafer table",

keywords = "Octrooi",

author = "{de Boer}, G. and MP Dansberg and P Kruit",

note = "Heeft nieuwheidsrapport. Aanvrager: Mapper Lithography IP B.V.; US2009/0027649 A1; Heeft nieuwheidsrapport. Aanvrager: Mapper Lithography IP B.V.",

year = "2009",

language = "Undefined/Unknown",

type = "Patent",

}