MIP plasma decapsulation of copper¿wired semiconductor devices for failure analysis

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Beenakker, C.I.M., Supervisor
Award date	15 Jan 2014
Place of Publication	Delft, The Netherlands
Print ISBNs	978¿94¿91909¿05¿4
DOIs	https://doi.org/10.4233/uuid:1069e3a0-90bc-46e3-8727-69d96107cc61
Publication status	Published - 2014

Access to Document

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title = "MIP plasma decapsulation of copper¿wired semiconductor devices for failure analysis",

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PY - 2014

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