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Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials
H. Liu*, Saravana B. Basuvalingam, Saurabh Lodha, Ageeth A. Bol, Herre S.J. van der Zant, Peter G. Steeneken, Gerard J. Verbiest*
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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