Particle-optical apparatus equipped with a gas ion source

P Kruit (Inventor), VN Tondare (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberUS7772564 B2
    IPCAanvrager: Fei Company
    Priority date10/08/10
    Publication statusPublished - 2010

    Bibliographical note

    Aanvrager: Fei Company

    Keywords

    • Octrooi
    • Verleend

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