Phase-field modelling of excimer laser lateral crystallization of silicon thin films

A Burtsev, M Apel, R Ishihara, CIM Beenakker

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)309-313
Number of pages5
JournalThin Solid Films
Volume427
Publication statusPublished - 2003

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS JFIS < 1.00

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