Probe current, probe size, and the practical brightness for probe forming systems

MS Bronsgeest, JE Barth, LW Swanson, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    47 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)949-955
    Number of pages7
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume26
    Issue number3
    Publication statusPublished - 2008

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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