Probe current, probe size, and the practical brightness for probe forming systems

MS Bronsgeest, JE Barth, LW Swanson, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	949-955
Number of pages	7
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	26
Issue number	3
Publication status	Published - 2008

Keywords

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title = "Probe current, probe size, and the practical brightness for probe forming systems",

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author = "MS Bronsgeest and JE Barth and LW Swanson and P Kruit",

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pages = "949--955",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

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TY - JOUR

T1 - Probe current, probe size, and the practical brightness for probe forming systems

AU - Bronsgeest, MS

AU - Barth, JE

AU - Swanson, LW

AU - Kruit, P

PY - 2008

Y1 - 2008

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

VL - 26

SP - 949

EP - 955

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 3

ER -