Projection lens arrangement

MJJ Wieland; BJ Kampherbeek; A.H. van Veen; P Kruit; S.W.H.K. Steenbrink

Projection lens arrangement

MJJ Wieland (Inventor), BJ Kampherbeek (Inventor), A.H. van Veen (Inventor), P Kruit (Inventor), S.W.H.K. Steenbrink (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	US2009/0261267 A1
IPC	heeft nieuwheidsrapport. Aanvrager: Mapper Lithography IP B.V.
Priority date	22/10/09
Publication status	Published - 2009

Bibliographical note

heeft nieuwheidsrapport. Aanvrager: Mapper Lithography IP B.V.

Keywords

Octrooi

Cite this

@misc{58b640053e2f45279e740cd9fcedfa51,

title = "Projection lens arrangement",

keywords = "Octrooi",

author = "MJJ Wieland and BJ Kampherbeek and {van Veen}, A.H. and P Kruit and S.W.H.K. Steenbrink",

note = "heeft nieuwheidsrapport. Aanvrager: Mapper Lithography IP B.V.; US2009/0261267 A1; heeft nieuwheidsrapport. Aanvrager: Mapper Lithography IP B.V.",

year = "2009",

language = "Undefined/Unknown",

type = "Patent",

}