Sputtered molybdenum as conductive material for high-temperature microhotplates

L Mele; F Santagata; E Iervolino; M Mihailovic; T Rossi; AT Tran; H Schellevis; JF Creemer; PM Sarro

Sputtered molybdenum as conductive material for high-temperature microhotplates

L Mele, F Santagata, E Iervolino, M Mihailovic, T Rossi, AT Tran, H Schellevis, JF Creemer, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

Original language	English
Title of host publication	Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
Editors	L-S Fan et al
Place of Publication	Piscatawaay, NJ, USA
Publisher	IEEE Society
Pages	2690-2693
Number of pages	4
ISBN (Print)	978-1-4577-0156-6
Publication status	Published - 2011
Event	TRANSDUCERS 2011 Conference, Beijing, PR China - Piscatawaay, NJ, USA Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name
Publisher	IEEE

Conference

Conference	TRANSDUCERS 2011 Conference, Beijing, PR China
Period	5/06/11 → 9/06/11

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

Mele, L., Santagata, F., Iervolino, E., Mihailovic, M., Rossi, T., Tran, AT., Schellevis, H., Creemer, JF., & Sarro, PM. (2011). Sputtered molybdenum as conductive material for high-temperature microhotplates. In L.-S. Fan et al (Ed.), Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) (pp. 2690-2693). IEEE Society.

@inproceedings{13a54be8b6554c8ea67c9722feb55263,

title = "Sputtered molybdenum as conductive material for high-temperature microhotplates",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "L Mele and F Santagata and E Iervolino and M Mihailovic and T Rossi and AT Tran and H Schellevis and JF Creemer and PM Sarro",

year = "2011",

language = "English",

isbn = "978-1-4577-0156-6",

publisher = "IEEE Society",

pages = "2690--2693",

editor = "{Fan et al}, L-S",

booktitle = "Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)",

note = "TRANSDUCERS 2011 Conference, Beijing, PR China ; Conference date: 05-06-2011 Through 09-06-2011",

}

Mele, L, Santagata, F, Iervolino, E, Mihailovic, M, Rossi, T, Tran, AT, Schellevis, H, Creemer, JF & Sarro, PM 2011, Sputtered molybdenum as conductive material for high-temperature microhotplates. in L-S Fan et al (ed.), Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). IEEE Society, Piscatawaay, NJ, USA, pp. 2690-2693, TRANSDUCERS 2011 Conference, Beijing, PR China, 5/06/11.

Sputtered molybdenum as conductive material for high-temperature microhotplates. / Mele, L; Santagata, F; Iervolino, E et al.
Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). ed. / L-S Fan et al. Piscatawaay, NJ, USA: IEEE Society, 2011. p. 2690-2693.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Sputtered molybdenum as conductive material for high-temperature microhotplates

AU - Mele, L

AU - Santagata, F

AU - Iervolino, E

AU - Mihailovic, M

AU - Rossi, T

AU - Tran, AT

AU - Schellevis, H

AU - Creemer, JF

AU - Sarro, PM

PY - 2011

Y1 - 2011

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4577-0156-6

SP - 2690

EP - 2693

BT - Technical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)

A2 - Fan et al, L-S

PB - IEEE Society

CY - Piscatawaay, NJ, USA

T2 - TRANSDUCERS 2011 Conference, Beijing, PR China

Y2 - 5 June 2011 through 9 June 2011

ER -