Theoretical and experimental investigations on Coulomb interactions in a Two-lens focussed ion beam instrument

J Bi, XR Jiang, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    14 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)439-442
    Number of pages4
    JournalMicroelectronic Engineering
    Volume35
    Issue number1-4
    Publication statusPublished - 1997

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