| Original language | English |
|---|---|
| IPC | G01R, H01L, G01N |
| Priority date | 29/10/21 |
| Publication status | Published - 2023 |
Bibliographical note
Patent: OCT-21-033Applicant: TU Delft
Applicant: TU Delft
Thermal test chip
H.W. van Zeijl (Inventor), Kouchi Zhang (Inventor), R. Sattari (Inventor)
Research output: Patent
Applicant: TU Delft