Through-membrane electron-beam lithography for ultrathin membrane applications

M. Neklyudova, A. K. Erdamar, L. Vicarelli, S. J. Heerema, T. Rehfeldt, G. Pandraud, Z. Koladouz Esfahani, C. Dekker, H. W. Zandbergen

Research output: Contribution to journal › Article › Scientific › peer-review

10 Citations (Scopus)
51 Downloads (Pure)

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