Engineering
Pressure Sensor
100%
Monolithic Integration
100%
Fabrication
66%
Surface
66%
Cavity
66%
Integration
66%
Front End
66%
Environment
33%
Sensing Membrane
33%
Measurement
33%
Scale Measurement
33%
Functionality
33%
Microelectromechanical System
33%
Wheatstone Bridge
33%
Forming
33%
Electronics
33%
Polycrystalline
33%
Membrane
33%
Metallizations
33%
Transducer
33%
Intended Operation
33%
Room Temperature
33%
Signal Amplification
33%
Process Monitoring
33%
Application Specific Integrated Circuit
33%
Combustion
33%
Design
33%
Analog Front
33%
Absolute Pressure
33%
Ohmic Contacts
33%
Titania
33%
Structural Health Monitoring
33%
Reference Pressure
33%
Elements
33%
INIS
sensors
100%
silicon carbides
100%
devices
60%
membranes
40%
surfaces
40%
cavities
40%
fabrication
40%
monitoring
40%
readout systems
40%
design
20%
amplification
20%
operation
20%
impedance
20%
temperature range 0273-0400 k
20%
polycrystals
20%
bridges
20%
transducers
20%
titanium
20%
yields
20%
aluminum
20%
doped materials
20%
environment
20%
topography
20%
combustion control
20%
signals
20%
deposition
20%
Keyphrases
Piezoresistive Pressure Sensor
100%
Logarithmic Response
25%
Conformal Deposition
25%
Sacrificial Release Process
25%
Piezoresistive Element
25%
Combustion Control
25%
Scale Measurement
25%
Surface Micromaching
25%
Sensing Membrane
25%
Pressure Device
25%
Absolute Pressure Sensor
25%
MEMS Platforms
25%
3C-silicon Carbide
25%
Material Science
Silicon Carbide
100%
Devices
60%
Membrane
40%
Surface
40%
Microelectromechanical System
20%
Temperature
20%
Topography
20%
Bar (Metal)
20%
Titanium
20%
Aluminum
20%