Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation

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Abstract

This work aims to develop a smart neural interface with transparent electrodes to allow for electrical monitoring of the site of interest during optogenetic stimulation of the spinal cord. In this paper, a microfabrication process for the wafer-level development of such a compact, active, transparent and flexible implant is presented. Graphene has been employed to form the transparent array of electrodes and tracks, on top of which chips have been bonded using flip-chip bonding techniques. To provide high flexibility, soft encapsulation, using polydimethylsiloxane (PDMS) has been used. Making use of the "Flex-to-Rigid" (F2R) technique, cm-size graphene-on-PDMS structures have been suspended and characterized using Raman spectroscopy to qualitatively evaluate the graphene layer, together with 2-point measurements to ensure the conductivity of the structure. In parallel, flip-chip bonding processes of chips on graphene structures were employed and the 2-point electrical measurement results have shown resistance values in the range of kΩ for the combined tracks and ball-bonds.
Original languageEnglish
Title of host publication2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019
PublisherIEEE
Pages1-5
Number of pages5
ISBN (Electronic)978-1-7281-2637-1
DOIs
Publication statusPublished - Oct 2020
Event2019 IEEE 14th Nanotechnology Materials and Devices Conference (NMDC) - Stockholm, Sweden, Stockholm, Sweden
Duration: 27 Oct 201930 Oct 2019
https://www.nmdc2019.conf.kth.se

Publication series

Name2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019

Conference

Conference2019 IEEE 14th Nanotechnology Materials and Devices Conference (NMDC)
Abbreviated titleIEEE NMDC
CountrySweden
CityStockholm
Period27/10/1930/10/19
Internet address

Keywords

  • Graphene
  • Neural interface
  • Optogenetic stimulation
  • PDMS
  • Transparent active implant

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