Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation

Andrada Iulia Velea; S. Vollebregt; T.B. Hosman; A. Pak; Vasiliki Giagka

doi:10.1109/NMDC47361.2019.9084021

Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation

Andrada Iulia Velea, S. Vollebregt, T.B. Hosman, A. Pak, Vasiliki Giagka

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

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Abstract

This work aims to develop a smart neural interface with transparent electrodes to allow for electrical monitoring of the site of interest during optogenetic stimulation of the spinal cord. In this paper, a microfabrication process for the wafer-level development of such a compact, active, transparent and flexible implant is presented. Graphene has been employed to form the transparent array of electrodes and tracks, on top of which chips have been bonded using flip-chip bonding techniques. To provide high flexibility, soft encapsulation, using polydimethylsiloxane (PDMS) has been used. Making use of the "Flex-to-Rigid" (F2R) technique, cm-size graphene-on-PDMS structures have been suspended and characterized using Raman spectroscopy to qualitatively evaluate the graphene layer, together with 2-point measurements to ensure the conductivity of the structure. In parallel, flip-chip bonding processes of chips on graphene structures were employed and the 2-point electrical measurement results have shown resistance values in the range of kΩ for the combined tracks and ball-bonds.

Original language	English
Title of host publication	2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019
Publisher	IEEE
Pages	1-5
Number of pages	5
ISBN (Electronic)	978-1-7281-2637-1
DOIs	https://doi.org/10.1109/NMDC47361.2019.9084021
Publication status	Published - Oct 2020
Event	2019 IEEE 14th Nanotechnology Materials and Devices Conference (NMDC) - Stockholm, Sweden, Stockholm, Sweden Duration: 27 Oct 2019 → 30 Oct 2019 https://www.nmdc2019.conf.kth.se

Publication series

Name	2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019

Conference

Conference	2019 IEEE 14th Nanotechnology Materials and Devices Conference (NMDC)
Abbreviated title	IEEE NMDC
Country/Territory	Sweden
City	Stockholm
Period	27/10/19 → 30/10/19
Internet address	https://www.nmdc2019.conf.kth.se

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Graphene
Neural interface
Optogenetic stimulation
PDMS
Transparent active implant

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10.1109/NMDC47361.2019.9084021

Towards_a_Microfabricated_Flexible_Graphene-Based_Active_Implant_for_Tissue_Monitoring_During_Optogenetic_Spinal_Cord_StimulationFinal published version, 1.65 MB

Cite this

Velea, A. I., Vollebregt, S., Hosman, T. B., Pak, A., & Giagka, V. (2020). Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation. In 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019 (pp. 1-5). Article 9084021 (2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019). IEEE. https://doi.org/10.1109/NMDC47361.2019.9084021

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author = "Velea, {Andrada Iulia} and S. Vollebregt and T.B. Hosman and A. Pak and Vasiliki Giagka",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 2019 IEEE 14th Nanotechnology Materials and Devices Conference (NMDC), IEEE NMDC ; Conference date: 27-10-2019 Through 30-10-2019",

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Velea, AI , Vollebregt, S, Hosman, TB, Pak, A & Giagka, V 2020, Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation. in 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019., 9084021, 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019, IEEE, pp. 1-5, 2019 IEEE 14th Nanotechnology Materials and Devices Conference (NMDC), Stockholm, Sweden, 27/10/19. https://doi.org/10.1109/NMDC47361.2019.9084021

Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation. / Velea, Andrada Iulia ; Vollebregt, S.; Hosman, T.B. et al.
2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019. IEEE, 2020. p. 1-5 9084021 (2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Hosman, T.B.

AU - Pak, A.

AU - Giagka, Vasiliki

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N2 - This work aims to develop a smart neural interface with transparent electrodes to allow for electrical monitoring of the site of interest during optogenetic stimulation of the spinal cord. In this paper, a microfabrication process for the wafer-level development of such a compact, active, transparent and flexible implant is presented. Graphene has been employed to form the transparent array of electrodes and tracks, on top of which chips have been bonded using flip-chip bonding techniques. To provide high flexibility, soft encapsulation, using polydimethylsiloxane (PDMS) has been used. Making use of the "Flex-to-Rigid" (F2R) technique, cm-size graphene-on-PDMS structures have been suspended and characterized using Raman spectroscopy to qualitatively evaluate the graphene layer, together with 2-point measurements to ensure the conductivity of the structure. In parallel, flip-chip bonding processes of chips on graphene structures were employed and the 2-point electrical measurement results have shown resistance values in the range of kΩ for the combined tracks and ball-bonds.

AB - This work aims to develop a smart neural interface with transparent electrodes to allow for electrical monitoring of the site of interest during optogenetic stimulation of the spinal cord. In this paper, a microfabrication process for the wafer-level development of such a compact, active, transparent and flexible implant is presented. Graphene has been employed to form the transparent array of electrodes and tracks, on top of which chips have been bonded using flip-chip bonding techniques. To provide high flexibility, soft encapsulation, using polydimethylsiloxane (PDMS) has been used. Making use of the "Flex-to-Rigid" (F2R) technique, cm-size graphene-on-PDMS structures have been suspended and characterized using Raman spectroscopy to qualitatively evaluate the graphene layer, together with 2-point measurements to ensure the conductivity of the structure. In parallel, flip-chip bonding processes of chips on graphene structures were employed and the 2-point electrical measurement results have shown resistance values in the range of kΩ for the combined tracks and ball-bonds.

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T3 - 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019

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Velea AI , Vollebregt S, Hosman TB, Pak A , Giagka V. Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation. In 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019. IEEE. 2020. p. 1-5. 9084021. (2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019). doi: 10.1109/NMDC47361.2019.9084021

Towards a Microfabricated Flexible Graphene-Based Active Implant for Tissue Monitoring During Optogenetic Spinal Cord Stimulation

Abstract

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Bibliographical note

Keywords

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