G. Jeevanandam – Research output — TU Delft Research Portal

1 Article
1 Dissertation (TU Delft)

1 results

Filter

2020
‘Cleanroom’ in SEM
Jeevanandam, G., van der Meijden, V., Birnie, L. D., Kruit, P. & Hagen, C. W., 2020, In: Microelectronic Engineering. 224, 7 p., 111239.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
2 Citations (Scopus)

92 Downloads (Pure)