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  • 2021

    Fabrication of Nanoslits with <111> Etching TSWE Method

    Hong, H., Ye, L., Li, K., Sarro, P. M., Zhang, G. & Liu, Z., 2021, Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021. IEEE, p. 174-177 4 p. 9451489. (Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021).

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