Approaching the resolution limit of nanometer-scale electron beam-induced deposition

WF van Dorp, B van Someren, CW Hagen, P Kruit, P. A. Crozier

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1303-1307
Number of pages	5
Journal	Nano Letters: a journal dedicated to nanoscience and nanotechnology
Volume	5
Issue number	7
Publication status	Published - 2005

Keywords

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title = "Approaching the resolution limit of nanometer-scale electron beam-induced deposition",

keywords = "ZX CWTS JFIS >= 3.00",

author = "{van Dorp}, WF and {van Someren}, B and CW Hagen and P Kruit and {A. Crozier}, P.",

year = "2005",

language = "Undefined/Unknown",

volume = "5",

pages = "1303--1307",

journal = "Nano Letters: a journal dedicated to nanoscience and nanotechnology",

issn = "1530-6984",

publisher = "American Chemical Society (ACS)",

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}

TY - JOUR

T1 - Approaching the resolution limit of nanometer-scale electron beam-induced deposition

AU - van Dorp, WF

AU - van Someren, B

AU - Hagen, CW

AU - Kruit, P

AU - A. Crozier, P.

PY - 2005

Y1 - 2005

KW - ZX CWTS JFIS >= 3.00

M3 - Article

SN - 1530-6984

VL - 5

SP - 1303

EP - 1307

JO - Nano Letters: a journal dedicated to nanoscience and nanotechnology

JF - Nano Letters: a journal dedicated to nanoscience and nanotechnology

IS - 7

ER -