Approaching the resolution limit of nanometer-scale electron beam-induced deposition

WF van Dorp, B van Someren, CW Hagen, P Kruit, P. A. Crozier

    Research output: Contribution to journalArticleScientificpeer-review

    232 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1303-1307
    Number of pages5
    JournalNano Letters: a journal dedicated to nanoscience and nanotechnology
    Volume5
    Issue number7
    Publication statusPublished - 2005

    Keywords

    • ZX CWTS JFIS >= 3.00

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