Electron optics of multi-beam scanning electron microscope

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20 Citations (Scopus)

Original language	English
Pages (from-to)	60-70
Journal	Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
Volume	645
Issue number	1
DOIs	https://doi.org/10.1016/j.nima.2010.12.090
Publication status	Published - 2011

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title = "Electron optics of multi-beam scanning electron microscope",

author = "A Mohammadi-Gheidari and P Kruit",

year = "2011",

doi = "10.1016/j.nima.2010.12.090",

language = "English",

volume = "645",

pages = "60--70",

journal = "Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment",

issn = "0168-9002",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - Electron optics of multi-beam scanning electron microscope

AU - Mohammadi-Gheidari, A

AU - Kruit, P

PY - 2011

Y1 - 2011

U2 - 10.1016/j.nima.2010.12.090

DO - 10.1016/j.nima.2010.12.090

M3 - Article

SN - 0168-9002

VL - 645

SP - 60

EP - 70

JO - Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

JF - Nuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment

IS - 1

ER -