Electron optics of multi-beam scanning electron microscope

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)60-70
JournalNuclear Instruments & Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
Volume645
Issue number1
DOIs
Publication statusPublished - 2011

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