Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications

Y Civale, LK Nanver, P Hadley, HW van Zeijl, EJG Goudena, H Schellevis

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationMaterial Research Society Symposium Proceedings (940E, Warrendale, PA) Semiconductor Nanowires Symposium Proceedings
EditorsV Schmidt
Place of PublicationSan Francisco, USA
PublisherMaterial Research Society
Publication statusPublished - 2006
EventMRS Spring Meeting - San Francisco, USA
Duration: 17 Apr 200621 Apr 2006

Publication series

PublisherMaterial Research Society


ConferenceMRS Spring Meeting

Bibliographical note

isbn: 978-1-55899-897-1, page: 0940-p05-04


  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this