Research output per year
Research output per year
| Original language | English |
|---|---|
| Patent number | TW 1464366 |
| IPC | G03F; G01B |
| Priority date | 21/03/11 |
| Publication status | Published - 2014 |
Bibliographical note
Patent: OCT-13-090Applicant: ASML Netherlands B.V.
Research output
- 1 Patent
-
Method and Apparatus for Determining Structure Parameters of Microstructures
El Gawhary, O. & Petra, S., 2012, IPC No. G03F; G01B, Priority date 21 Mar 2011, Priority No. US 2012/0243004 A1Research output: Patent