Multibeam Electron Source using MEMS Electron Optical Components

B van Someren, MJ van Bruggen, Y Zhang, CW Hagen, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1092-1097
Number of pages	6
Journal	Journal of Physics D: Applied Physics
Volume	C. Series
Issue number	34
Publication status	Published - 2006

Keywords

@article{064cd881473a40e3acfbc9443db84950,

title = "Multibeam Electron Source using MEMS Electron Optical Components",

keywords = "conference contrib. refereed, CWTS 0.75 <= JFIS < 2.00",

author = "{van Someren}, B and {van Bruggen}, MJ and Y Zhang and CW Hagen and P Kruit",

year = "2006",

language = "Undefined/Unknown",

volume = "C. Series",

pages = "1092--1097",

journal = "Journal of Physics D: Applied Physics",

issn = "0022-3727",

publisher = "IOP Publishing",

number = "34",

}

TY - JOUR

T1 - Multibeam Electron Source using MEMS Electron Optical Components

AU - van Someren, B

AU - van Bruggen, MJ

AU - Zhang, Y

AU - Hagen, CW

AU - Kruit, P

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0022-3727

VL - C. Series

SP - 1092

EP - 1097

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 34

ER -