A. Mohammadi Gheidari – Research output — TU Delft Research Portal

7 Article
2 Conference contribution
2 Abstract
1 Patent
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- 1 Dissertation (TU Delft)

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2020

Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets
Kruit, P., Mohammadi Gheidari, A. & Kieft, E. R., 2020, IPC No. H01J, G21K, Priority date 27 Feb 2019, Priority No. US 2020273667 A1
Research output: Patent