@phdthesis{a324902ba15742449cf31ca627ef641b,
title = "Cleanroom in an SEM",
abstract = "The work described in the doctoral thesis aims to enhance the functionality of a scanning electron microscope (SEM) by integrating miniaturized versions of cleanroom tools used in microfabrication. The thesis presents the integration of substrate heating, in-situ thermal atomic layer deposition (ALD), sputtering, and thermal evaporation within the SEM. These techniques are expected to enable fast and efficient fabrication of proof-of-concept devices with minimal resources. The thesis also discusses the challenges, limitations, and future work of the integrated cleanroom processes in SEM.",
author = "G. Jeevanandam",
year = "2024",
doi = "10.4233/uuid:a324902b-a157-4244-9cf3-1ca627ef641b",
language = "English",
isbn = "978-94-6384-541-0",
type = "Dissertation (TU Delft)",
school = "Delft University of Technology",
}