Integrated optical and charged particle inspection apparatus

J.P. Hoogenboom (Inventor), Sander den Hoedt (Inventor)

ImPhys/Microscopy Instrumentation & Techniques

Research output: Patent

1 Patent

1 results

2023

Integrated optical and charged particle inspection apparatus
Hoogenboom, J. P. & den Hoedt, S., 2023, IPC No. H01J, Patent No. US 11742173 B2, Priority date 24 Sept 2020
Research output: Patent