20052018

Research output per year

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Research Output

  • 7 Conference contribution
  • 6 Article
  • 1 Conference article

Deposition and patterning of magnetic atom trap lattices in FePt films with periods down to 200 nm

La Rooij, A. L., Couet, S., Van Der Krogt, M. C., Vantomme, A., Temst, K. & Spreeuw, R. J. C., 28 Jul 2018, In : Journal of Applied Physics. 124, 4, 044902.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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  • 1 Citation (Scopus)
    14 Downloads (Pure)

    High-dose exposure of silicon in electron beam lithography

    Grigorescu, AE., van der Krogt, MC., van der Drift, EWJM. & Hagen, CW., 2008, In : Journal of Micro/Nanolithography, MEMS, and MOEMS. 7, 1, p. 013005-1-013005-4

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    10 nm lines and spaces written in HSQ using electron beam lithography

    Grigorescu, AE., van der Krogt, MC., Hagen, CW. & Kruit, P., 2007, In : Microelectronic Engineering. 84, p. 822-824 3 p.

    Research output: Contribution to journalArticleScientificpeer-review

    75 Citations (Scopus)