Research output per year
Research output per year
Search results
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2023
Simulations and concepts for a 2-D spin-echo modulated SANS (SEMSANS) instrument
Parnell, S. R., Berg, S. V. D., Bolderink, G. & Bouwman, W. G., 2023, In: Journal of Physics: Conference Series. 2481, 1, 9 p., 012007.Research output: Contribution to journal › Conference article › Scientific › peer-review
Open AccessFile35 Downloads (Pure) -
2015
Focused Electron Beam Induced Deposition of 1,1-dichloro-1-silacyclohexane, silacyclohexane and 1,3,5-trisilacyclohexane; preliminary study on the role of low energy secondary electrons in the deposition process
Ingolfsson, O., Kumar, R., Hagen, CW. & Hari, S., 2015, In: Journal of Physics: Conference Series. 635, art.nr. 072088, p. 1-1 1 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
Open Access1 Citation (Scopus) -
2014
Determination of line edge roughness in low-dose top-down scanning electron microscopy images
Verduin, T., Kruit, P. & Hagen, CW., 2014, In: Proceedings of SPIE- International Society for Optical Engineering. 9050, p. 1-3 3 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
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2012
Coherent Fourier Scatterometry (Tool for improved sensitivity in semiconductor metrology)
Kumar, N., El Gawhary, O., Kutchoukov, VG., Pereira, SF., Coene, W. & Urbach, HP., 2012, In: Proceedings of SPIE- International Society for Optical Engineering. 8324, p. 1-8 8 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
20 Citations (Scopus) -
2010
Angle and phase coding in optical recording
Pereira, SF., Spronck, JFP., Kutchoukov, VG. & Bachor, H-A., 2010, In: Proceedings of SPIE- International Society for Optical Engineering. 7730, p. 77300F-77300F-8Research output: Contribution to journal › Conference article › Scientific › peer-review
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2008
MAPPER: high throughput maskless lithography
Slot, E., Wieland, M. J. J., de Boer, G., Kruit, P. & ten Berge, GF., 2008, In: Proceedings of SPIE- International Society for Optical Engineering. 6921, p. 69211P-1-69211P-9Research output: Contribution to journal › Conference article › Scientific › peer-review
64 Citations (Scopus) -
The nucleation stage in electron beam induced deposition
Hagen, CW., van Dorp, WF. & A. Crozier, P., 2008, In: Journal of Physics: Conference Series. 126, p. 1-4 4 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
6 Citations (Scopus) -
2007
Sub- 10-nm structures written in ultra-thin HSQ resist layers, using Electron Beam Lithography
Grigorescu, AE., van der Krogt, MC. & Hagen, CW., 2007, In: Proceedings of SPIE- International Society for Optical Engineering. 6519Research output: Contribution to journal › Conference article › Scientific › peer-review
12 Citations (Scopus)