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2000
Medea projekt T602: Process monitoring and yield management (0.5 um -0.35 um) (promyma) Confidential
Sarro, PM., 2000, Delft: Faculty of Information Technology and Systems, TU Delft.Research output: Book/Report › Report › Scientific
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2014
AlN piezoelectric films for sensing and actuation
Tran, AT., 2014, Delft, The Netherlands. 135 p.Research output: Thesis › Dissertation (TU Delft)
Open Access -
2008
Temperature calibration of fast scan calorimeter chips
Iervolino, E., van Herwaarden, AW. & Sarro, PM., 2008, Proceedings of the conference EUROSENSORS XXII. Gerlach, G. (ed.). Dresden, Germany: Verein Deutscher Ingenieure e.V., p. 773-776 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Conductivity detection for application in capillary electrophoresis microchips
Laugere, FPJ., 2003, s.l.: s.n.. 155 p.Research output: Thesis › Dissertation (TU Delft)
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2015
Dissolved organic nitrogen (DON) during batch denitrification of low concentrations of nitrate using suspended and attached biomass
Brandao, DN., Spanjers, H. & van Lier, JB., 2015, In: Water Science and Technology. 72, 11, p. 1896-1902 7 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access3 Citations (Scopus) -
2002
Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
Iordanov, VP., Sarro, PM., Wolffenbuttel, RF. & Vellekoop, MJ., 2002, IPC No. niet eerder gehonnoreerd, Patent No. WO 02/090945 A2, Priority date 14 Nov 2002Research output: Patent
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2006
Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)
French, PJ. & Sarro, PM., 2006, MEMS, A practical guide to design, analysis and applications. Korvinck, JG. & Paul, O. (eds.). Norwich, NY: William Andrew Publishing, p. 805-851 47 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review
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2000
Readout of a LaCl3(Ce3+) Scintillation Crystal with a Large Area Avalanche Photodiode
Allier, CP., Hollander, RW., Sarro, PM., de Boer, M., Czirr, JB. & van Eijk, CWE., 2000, Book of Abstracts of the 2000 IEEE NSS MIC conference, 15-20 October 2000, Lyon, France. p. 63-63Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
2 Citations (Scopus) -
2009
Fast response thermal linear motor with reduced power consumption.
Paalvast, SL., Pham, HTM., Sarro, PM. & Munnig Schmidt, RH., 2009, Proceedings of the Eurosensors XXIII Conference, august 2009. s.n. (ed.). Procedia Chemistry, p. 690-693 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
4 Citations (Scopus) -
1999
Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
Gennissen, PTJ., Ohji, H., French, PJ., Ashruf, CMA., O Halloran, GMO. & Sarro, PM., 1999, Eurosensors XIII: proceedings [CD-ROM]. M Bartek (ed.). Delft: Delft University of Technology, p. 1029-1032 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
Silicon MEMS for detection of solid and liquid fronts
Wei, J., 2010, Delft. 133 p.Research output: Thesis › Dissertation (TU Delft)
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1999
Recent progress in technology and applications of membrane micromachined deformable mirrors
Vdovin, G., Sarro, PM., Gonté, F., Collings, N. & Dandliker, R., 1999, Proceedings of SPIE, vol. 3760. JD Gonglewski & MA Vorontsov (eds.). Bellingham: International Society for Optical Engineering, p. 2-11 10 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2006
Some properties of a room temperature THz detection array
Pandraud, G., Iordanov, VP., Kasalynas, I., Adam, AJL., Klaassen, TO., Hovenier, JN. & Sarro, PM., 2006, Some properties of a room temperature THz detection array. s.n. (ed.). Vilnius, Lithuania: SPIE, p. 1-7 7 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2013
Improving methane production and phosphorus release from saline sludge in anaerobic digestion
Zhang, X., Ferreira, RB., Hu, J., Spanjers, H. & van Lier, JB., 2013, Proceedings of IWA anaerobic digestion world conference. s.n. (ed.). s.l.: s.n., p. 1-5 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2007
A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices
Alan, T. & Sarro, PM., 2007, Material research society symposium proceeding. LaVan, DA., da Silva, MG., Spearing, SM. & Vengallatore, S. (eds.). Warrendale: Materials Research Society, p. 1-5 5 p. (Materials Research Society Symposium Proceedings; vol. 1052).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2009
Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
Tran, AT., Schellevis, H., Shen, C., Pham, HTM. & Sarro, PM., 2009, Proc. of SAFE 2009. French, PJ. (ed.). Veldhoven, the Netherlands: STW, p. 121-124 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional
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2012
Anaerobic digestion
Batstone, DJ., Spanjers, H., Rodriguez, J. & van Lier, JB., 2012, Global trends & challenges in water science, reserch and management. Hong Li (ed.). London: International Water Association (IWA), p. 1-3 107 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2003
A model for film thickness using direct spray coating
Pham, PN., Burghartz, JN. & Sarro, PM., 2003, EPTC 2003; proceedings. s.n. (ed.). s.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2005
Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films
Pham, TMH., de Boer, CR., Visser, CCG. & Sarro, PM., 2005, In: Electrochemical Society. Journal. 152, 11, p. 889-893 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access1 Citation (Scopus) -
1999
Lamb wave sensor with tensile ZnO for liquid property sensing
Koller, S., Brand, O., Baltes, H., Jakoby, BH., Sarro, PM. & Vellekoop, MJ., 1999, Transducers '99: digest of technical papers. Vol. 2. Tokyo: Institute of Electrical Engineers of Japan, p. 1512-1515 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1996
Silicon Drift Detectors for the Detection of X-rays and gamma-rays
Valk, H., Hijzen, EA., Huizenga, J., van Eijk, CWE., Hollander, RW., Nanver, LK., Sarro, PM., van Bogaard, A. & Slabbekoorn, J., 1996, Proceedings of the 1996 National Sensor Conference. Dorenbos, P. & van Eijk, CWE. (eds.). Delft: Delft University Press, p. 103-107 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
SU-8 structures for integrated high-speed screening
Gray, BL., Iordanov, VP., Sarro, PM. & Bossche, A., 2002, Micro total analysis systems 2002; proceedings of the µTAS 2002 symposium. Baba, Y., Shoji, S. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 464-466 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
Thermal actuation for percision micro motion and positioning
Paalvast, SL., 2010, Delft. 212 p.Research output: Thesis › Dissertation (TU Delft)
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2019
Gas recovery from wastewater
van Lier, J., Spanjers, H. & van Linden, N., 2019, IPC No. B01D, C02F, Priority date 1 Feb 2018, Priority No. WO 2019/151855Research output: Patent
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2005
Low temperature LPCVD SiN direct bonding for sensors
Hsu, CL., Pandraud, G., Creemer, JF., French, PJ. & Sarro, PM., 2005, Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). s.n. (ed.). Den Haag: Dutch Technology Foundation, p. 162-166 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Integrated shape sensor for particles and cells based on optical projection
Nieuwenhuis, JH., Lubking, W., Berthold, A., Sarro, PM. & Vellekoop, MJ., 2000, SAFE-ProRISC-SeSens 2000: proceedings. JP Veen (ed.). Utrecht: STW Technology Foundation, p. 669-672 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Though-wafer copper electropating for 3-D interconnects
Nguyen, NT., Boellaard, E., Pham, PN., Kiutchoukov, VG., Cracium, G. & Sarro, PM., 2001, MME 2001. S.l.: s.n., p. 74-77 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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1998
Thin photodiodes for a scintillator-silicon well dectector
Allier, CP., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1998, Proceedings of the 28th ESSDERC98. A Toubout, Y Danto, JP Klein & H Grunbacher (eds.). Bordeau: Frontieres, p. 176-179 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Sealing RIE etch holes for an epi-micromachined pressure sensor
Goosen, JFL., Dartee, JP., den Boer, C., French, PJ. & Sarro, PM., 2000, MME '00. Y Bäcklund & C Hedlund (eds.). S.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2007
Oxide to oxide wafer bonding for three dimensional (3D) IC integration technologies
Cannavo, M., van Zeijl, HW., Pandraud, G., Driel, JV., Alan, T. & Sarro, PM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). Veldhoven, The Netherlands: STW, p. 509-512 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Fouling control in anaerobic membrane bioreactors under saline conditions
Yang, J., Spanjers, H. & van Lier, JB., 2013, Proceedings of IWA anaerobic digestion world conference. s.n. (ed.). s.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2010
A 80nm thick silicon nanosheet FET for sensing applications
Moh, TSY., Pandraud, G., Tong, HD., de Smet, LCPM., Sudholter, EJR., Rijn, C. & Sarro, PM., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 122-126 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
First measurement results with an integrated projection citometer
Nieuwenhuis, JH., Bastemeijer, J., Sarro, PM. & Vellekoop, MJ., 2003, MTAS 2003 Seventh international conference on micro total analysis systems. Northrup, MA., Jensen, KF. & Harrison, DJ. (eds.). San Diego: Transducer Research Foundation, p. 1219-1222 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Medea Project review Project T651: Design for manufacturability & rapid technology learning (confidential)
Sarro, PM., 2000, Delft: Faculty of Information Technology and Systems, TU Delft.Research output: Book/Report › Report › Scientific
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2001
New post-processing modules
Pakula, L., Pham, HMT., de Boer, CR., Sarro, PM. & French, PJ., 2001, SAFE - ProRISC - SeSens 2001: proceeding. Semicoductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht: STW Technology Foundation, p. 848-851 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography
Olivadoti, C., Pham, HTM. & Sarro, PM., 2007, Proc. 18th MicroMechanics Europe (MME 2006). s.n. (ed.). Guimares, Portugal: Univ.of Minho.Ed., p. 195-198 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Investigation into the factors affecting the shaft resistance of driven piles in sands
Igoe, D., Gavin, K. & Kirwan, L., 2013, Installation Effects in Geotechnical Engineering - Proceedings of the International Conference on Installation Effects in Geotechnical Engineering, ICIEGE 2013. p. 252-257 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
1 Citation (Scopus) -
2016
VarVis: Visualizing Anatomical Variation in Branching Structures
Smit, N. N., Kraima, A., Jansma, D., DeRuiter, M., Eisemann, E. & Vilanova Bartroli, A., 2016, EuroVis 2016 - Short Papers. Bertini, E., Elmqvist, N. & Wischgoll, T. (eds.). The Eurographics Association, p. 1-5 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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BMC: Toolkit for Bayesian analysis of Computational Models using samplers
Thijssen, B., Dijkstra, T. M. H., Heskes, T. & Wessels, L., 2016, In: BMC Systems Biology. p. 1-8 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile12 Citations (Scopus)53 Downloads (Pure) -
2013
Closure to "Simulating nonresidential water demand with a stochastic end-use model"
Blokker, EJM., Pieterse-Quirijns, EJ., Vreeburg, JHG. & van Dijk, JC., 2013, In: Journal of Water Resources Planning and Management. 139, 3, p. 347-348 2 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
2010
Multiobjective optimization of operational responses for contaminant flushing in water distribution networks
Alfonso, L., Jonoski, A. & Solomatine, DP., 2010, In: Journal of Water Resources Planning and Management. 136, 1, p. 48-58 11 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
2005
Determination of perchlorate rejection and associated inorganic fouling (scaling) for reverse osmosis and nanofiltration membranes under various operating conditions
Yoon, J., Yoon, Y., Amy, GL. & Her, N., 2005, In: Journal of Environmental Engineering. 131, 5, p. 726-733 8 p.Research output: Contribution to journal › Article › Scientific
15 Citations (Scopus) -
2011
A fuzzy logic approach for capturing spatial precipitation variability in complex terrain
Hrachowitz, M. & Weiler, M., 2011, In: Journal of Hydrologic Engineering. 16, 5, p. 460-471 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
2020
Material decomposition from a single x-ray projection via single-grid phase contrast imaging
Groenendijk, C. F., Schaff, F., Croton, L. C. P., Kitchen, M. J. & Morgan, K. S., 2020, In: Optics Letters. 45, 14, p. 4076-4079Research output: Contribution to journal › Article › Scientific › peer-review
6 Citations (Scopus) -
2006
Measuring the near-field of extra-ordinary transmission through a periodic hole-array
Docter, MW., Young, IT., Piciu, OM., Bossche, A., Alkemade, PFA., van den Berg, PM. & Garini, Y., 2006, In: Proceedings of SPIE- International Society for Optical Engineering. 6195Research output: Contribution to journal › Conference article › Scientific › peer-review
1 Citation (Scopus) -
2012
Physical and numerical modeling of the entrainment by a high-concentration mud suspension
Bruens, AW., Winterwerp, JC. & Kranenburg, C., 2012, In: Journal of Hydraulic Engineering (Reston). 138, 6, p. 479-490 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access12 Citations (Scopus) -
2008
General imaging of advanced 3D mask object based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory.
van Haver, S., Janssen, OTA., Braat, JJM., Janssen, AJEM., Urbach, HP. & Pereira, SF., 2008, In: Proceedings of SPIE- International Society for Optical Engineering. 6924, 35, p. 1-8 8 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
4 Citations (Scopus) -
2004
Experimental performance of homothetic mapping for wide field interferometer imaging
van der Avoort, C., van Brug, H., den Herder, J-W., D'Arcio, LA. & Le Poole, R., 2004, In: Proceedings of SPIE- International Society for Optical Engineering. 5491, p. 1587-1597 11 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
2 Citations (Scopus) -
2002
Technological aspects of a custom CMOS sensor for adaptive optics
de Lima Monteiro, DW., Vdovin, GV. & Sarro, PM., 2002, In: Proceedings of SPIE- International Society for Optical Engineering. p. 31-36 6 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
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2005
Geobacteraceae community composition is related to hydrochemistry and biodegradation in an iron-reducing aquifer polluted by a neighboring landfill
Lin, B., Braster, M., van Breukelen, BM., van Verseveld, HW., Westerhoff, HV. & Roling, WFM., Oct 2005, In: Applied and Environmental Microbiology. 71, 10, p. 5983-5991Research output: Contribution to journal › Article › Scientific › peer-review