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2000
Medea projekt T602: Process monitoring and yield management (0.5 um -0.35 um) (promyma) Confidential
Sarro, PM., 2000, Delft: Faculty of Information Technology and Systems, TU Delft.Research output: Book/Report › Report › Scientific
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2014
AlN piezoelectric films for sensing and actuation
Tran, AT., 2014, Delft, The Netherlands. 135 p.Research output: Thesis › Dissertation (TU Delft)
Open Access -
2008
Temperature calibration of fast scan calorimeter chips
Iervolino, E., van Herwaarden, AW. & Sarro, PM., 2008, Proceedings of the conference EUROSENSORS XXII. Gerlach, G. (ed.). Dresden, Germany: Verein Deutscher Ingenieure e.V., p. 773-776 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Conductivity detection for application in capillary electrophoresis microchips
Laugere, FPJ., 2003, s.l.: s.n.. 155 p.Research output: Thesis › Dissertation (TU Delft)
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2015
Dissolved organic nitrogen (DON) during batch denitrification of low concentrations of nitrate using suspended and attached biomass
Brandao, DN., Spanjers, H. & van Lier, JB., 2015, In: Water Science and Technology. 72, 11, p. 1896-1902 7 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access3 Citations (Scopus) -
2002
Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
Iordanov, VP., Sarro, PM., Wolffenbuttel, RF. & Vellekoop, MJ., 2002, IPC No. niet eerder gehonnoreerd, Patent No. WO 02/090945 A2, Priority date 14 Nov 2002Research output: Patent
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2006
Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)
French, PJ. & Sarro, PM., 2006, MEMS, A practical guide to design, analysis and applications. Korvinck, JG. & Paul, O. (eds.). Norwich, NY: William Andrew Publishing, p. 805-851 47 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review
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2000
Readout of a LaCl3(Ce3+) Scintillation Crystal with a Large Area Avalanche Photodiode
Allier, CP., Hollander, RW., Sarro, PM., de Boer, M., Czirr, JB. & van Eijk, CWE., 2000, Book of Abstracts of the 2000 IEEE NSS MIC conference, 15-20 October 2000, Lyon, France. p. 63-63Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
2 Citations (Scopus) -
2009
Fast response thermal linear motor with reduced power consumption.
Paalvast, SL., Pham, HTM., Sarro, PM. & Munnig Schmidt, RH., 2009, Proceedings of the Eurosensors XXIII Conference, august 2009. s.n. (ed.). Procedia Chemistry, p. 690-693 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
4 Citations (Scopus) -
1999
Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
Gennissen, PTJ., Ohji, H., French, PJ., Ashruf, CMA., O Halloran, GMO. & Sarro, PM., 1999, Eurosensors XIII: proceedings [CD-ROM]. M Bartek (ed.). Delft: Delft University of Technology, p. 1029-1032 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
Silicon MEMS for detection of solid and liquid fronts
Wei, J., 2010, Delft. 133 p.Research output: Thesis › Dissertation (TU Delft)
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1999
Recent progress in technology and applications of membrane micromachined deformable mirrors
Vdovin, G., Sarro, PM., Gonté, F., Collings, N. & Dandliker, R., 1999, Proceedings of SPIE, vol. 3760. JD Gonglewski & MA Vorontsov (eds.). Bellingham: International Society for Optical Engineering, p. 2-11 10 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2006
Some properties of a room temperature THz detection array
Pandraud, G., Iordanov, VP., Kasalynas, I., Adam, AJL., Klaassen, TO., Hovenier, JN. & Sarro, PM., 2006, Some properties of a room temperature THz detection array. s.n. (ed.). Vilnius, Lithuania: SPIE, p. 1-7 7 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2013
Improving methane production and phosphorus release from saline sludge in anaerobic digestion
Zhang, X., Ferreira, RB., Hu, J., Spanjers, H. & van Lier, JB., 2013, Proceedings of IWA anaerobic digestion world conference. s.n. (ed.). s.l.: s.n., p. 1-5 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2007
A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices
Alan, T. & Sarro, PM., 2007, Material research society symposium proceeding. LaVan, DA., da Silva, MG., Spearing, SM. & Vengallatore, S. (eds.). Warrendale: Materials Research Society, p. 1-5 5 p. (Materials Research Society Symposium Proceedings; vol. 1052).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2009
Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
Tran, AT., Schellevis, H., Shen, C., Pham, HTM. & Sarro, PM., 2009, Proc. of SAFE 2009. French, PJ. (ed.). Veldhoven, the Netherlands: STW, p. 121-124 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional
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2012
Anaerobic digestion
Batstone, DJ., Spanjers, H., Rodriguez, J. & van Lier, JB., 2012, Global trends & challenges in water science, reserch and management. Hong Li (ed.). London: International Water Association (IWA), p. 1-3 107 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2003
A model for film thickness using direct spray coating
Pham, PN., Burghartz, JN. & Sarro, PM., 2003, EPTC 2003; proceedings. s.n. (ed.). s.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2005
Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films
Pham, TMH., de Boer, CR., Visser, CCG. & Sarro, PM., 2005, In: Electrochemical Society. Journal. 152, 11, p. 889-893 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access1 Citation (Scopus) -
1999
Lamb wave sensor with tensile ZnO for liquid property sensing
Koller, S., Brand, O., Baltes, H., Jakoby, BH., Sarro, PM. & Vellekoop, MJ., 1999, Transducers '99: digest of technical papers. Vol. 2. Tokyo: Institute of Electrical Engineers of Japan, p. 1512-1515 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1996
Silicon Drift Detectors for the Detection of X-rays and gamma-rays
Valk, H., Hijzen, EA., Huizenga, J., van Eijk, CWE., Hollander, RW., Nanver, LK., Sarro, PM., van Bogaard, A. & Slabbekoorn, J., 1996, Proceedings of the 1996 National Sensor Conference. Dorenbos, P. & van Eijk, CWE. (eds.). Delft: Delft University Press, p. 103-107 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
SU-8 structures for integrated high-speed screening
Gray, BL., Iordanov, VP., Sarro, PM. & Bossche, A., 2002, Micro total analysis systems 2002; proceedings of the µTAS 2002 symposium. Baba, Y., Shoji, S. & van den Berg, A. (eds.). Dordrecht: Kluwer Academic Publishers, p. 464-466 3 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
Thermal actuation for percision micro motion and positioning
Paalvast, SL., 2010, Delft. 212 p.Research output: Thesis › Dissertation (TU Delft)
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2019
Gas recovery from wastewater
van Lier, J., Spanjers, H. & van Linden, N., 2019, IPC No. B01D, C02F, Priority date 1 Feb 2018, Priority No. WO 2019/151855Research output: Patent
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2005
Low temperature LPCVD SiN direct bonding for sensors
Hsu, CL., Pandraud, G., Creemer, JF., French, PJ. & Sarro, PM., 2005, Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). s.n. (ed.). Den Haag: Dutch Technology Foundation, p. 162-166 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Integrated shape sensor for particles and cells based on optical projection
Nieuwenhuis, JH., Lubking, W., Berthold, A., Sarro, PM. & Vellekoop, MJ., 2000, SAFE-ProRISC-SeSens 2000: proceedings. JP Veen (ed.). Utrecht: STW Technology Foundation, p. 669-672 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Though-wafer copper electropating for 3-D interconnects
Nguyen, NT., Boellaard, E., Pham, PN., Kiutchoukov, VG., Cracium, G. & Sarro, PM., 2001, MME 2001. S.l.: s.n., p. 74-77 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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1998
Thin photodiodes for a scintillator-silicon well dectector
Allier, CP., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1998, Proceedings of the 28th ESSDERC98. A Toubout, Y Danto, JP Klein & H Grunbacher (eds.). Bordeau: Frontieres, p. 176-179 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Sealing RIE etch holes for an epi-micromachined pressure sensor
Goosen, JFL., Dartee, JP., den Boer, C., French, PJ. & Sarro, PM., 2000, MME '00. Y Bäcklund & C Hedlund (eds.). S.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2007
Oxide to oxide wafer bonding for three dimensional (3D) IC integration technologies
Cannavo, M., van Zeijl, HW., Pandraud, G., Driel, JV., Alan, T. & Sarro, PM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). Veldhoven, The Netherlands: STW, p. 509-512 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Fouling control in anaerobic membrane bioreactors under saline conditions
Yang, J., Spanjers, H. & van Lier, JB., 2013, Proceedings of IWA anaerobic digestion world conference. s.n. (ed.). s.l.: s.n., p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2010
A 80nm thick silicon nanosheet FET for sensing applications
Moh, TSY., Pandraud, G., Tong, HD., de Smet, LCPM., Sudholter, EJR., Rijn, C. & Sarro, PM., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 122-126 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
First measurement results with an integrated projection citometer
Nieuwenhuis, JH., Bastemeijer, J., Sarro, PM. & Vellekoop, MJ., 2003, MTAS 2003 Seventh international conference on micro total analysis systems. Northrup, MA., Jensen, KF. & Harrison, DJ. (eds.). San Diego: Transducer Research Foundation, p. 1219-1222 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Medea Project review Project T651: Design for manufacturability & rapid technology learning (confidential)
Sarro, PM., 2000, Delft: Faculty of Information Technology and Systems, TU Delft.Research output: Book/Report › Report › Scientific
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2001
New post-processing modules
Pakula, L., Pham, HMT., de Boer, CR., Sarro, PM. & French, PJ., 2001, SAFE - ProRISC - SeSens 2001: proceeding. Semicoductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht: STW Technology Foundation, p. 848-851 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Straight sidewall controlling of high viscosity SU-8 photoresist patterning using UV lithography
Olivadoti, C., Pham, HTM. & Sarro, PM., 2007, Proc. 18th MicroMechanics Europe (MME 2006). s.n. (ed.). Guimares, Portugal: Univ.of Minho.Ed., p. 195-198 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Investigation into the factors affecting the shaft resistance of driven piles in sands
Igoe, D., Gavin, K. & Kirwan, L., 2013, Installation Effects in Geotechnical Engineering - Proceedings of the International Conference on Installation Effects in Geotechnical Engineering, ICIEGE 2013. p. 252-257 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
1 Citation (Scopus) -
2016
VarVis: Visualizing Anatomical Variation in Branching Structures
Smit, N. N., Kraima, A., Jansma, D., DeRuiter, M., Eisemann, E. & Vilanova Bartroli, A., 2016, EuroVis 2016 - Short Papers. Bertini, E., Elmqvist, N. & Wischgoll, T. (eds.). The Eurographics Association, p. 1-5 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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BMC: Toolkit for Bayesian analysis of Computational Models using samplers
Thijssen, B., Dijkstra, T. M. H., Heskes, T. & Wessels, L., 2016, In: BMC Systems Biology. p. 1-8 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile12 Citations (Scopus)53 Downloads (Pure) -
2013
Closure to "Simulating nonresidential water demand with a stochastic end-use model"
Blokker, EJM., Pieterse-Quirijns, EJ., Vreeburg, JHG. & van Dijk, JC., 2013, In: Journal of Water Resources Planning and Management. 139, 3, p. 347-348 2 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
2010
Multiobjective optimization of operational responses for contaminant flushing in water distribution networks
Alfonso, L., Jonoski, A. & Solomatine, DP., 2010, In: Journal of Water Resources Planning and Management. 136, 1, p. 48-58 11 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
2005
Determination of perchlorate rejection and associated inorganic fouling (scaling) for reverse osmosis and nanofiltration membranes under various operating conditions
Yoon, J., Yoon, Y., Amy, GL. & Her, N., 2005, In: Journal of Environmental Engineering. 131, 5, p. 726-733 8 p.Research output: Contribution to journal › Article › Scientific
15 Citations (Scopus) -
2011
A fuzzy logic approach for capturing spatial precipitation variability in complex terrain
Hrachowitz, M. & Weiler, M., 2011, In: Journal of Hydrologic Engineering. 16, 5, p. 460-471 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
2013
The use of synchrotron radiation for the characterization of artists' pigments and paintings
Janssens, K., Alfeld, M., Van der Snickt, G., de Nolf, W., Vanmeert, F., Radepont, M., Monico, L., Dik, J., Cotte, M., Falkenberg, G., Miliani, C. & Brunetti, BG., 2013, In: Annual Review of Analytical Chemistry. 6, p. 399-425 27 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access57 Citations (Scopus) -
2020
Material decomposition from a single x-ray projection via single-grid phase contrast imaging
Groenendijk, C. F., Schaff, F., Croton, L. C. P., Kitchen, M. J. & Morgan, K. S., 2020, In: Optics Letters. 45, 14, p. 4076-4079Research output: Contribution to journal › Article › Scientific › peer-review
6 Citations (Scopus) -
2006
Measuring the near-field of extra-ordinary transmission through a periodic hole-array
Docter, MW., Young, IT., Piciu, OM., Bossche, A., Alkemade, PFA., van den Berg, PM. & Garini, Y., 2006, In: Proceedings of SPIE- International Society for Optical Engineering. 6195Research output: Contribution to journal › Conference article › Scientific › peer-review
1 Citation (Scopus) -
2012
Physical and numerical modeling of the entrainment by a high-concentration mud suspension
Bruens, AW., Winterwerp, JC. & Kranenburg, C., 2012, In: Journal of Hydraulic Engineering (Reston). 138, 6, p. 479-490 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access12 Citations (Scopus) -
2008
General imaging of advanced 3D mask object based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory.
van Haver, S., Janssen, OTA., Braat, JJM., Janssen, AJEM., Urbach, HP. & Pereira, SF., 2008, In: Proceedings of SPIE- International Society for Optical Engineering. 6924, 35, p. 1-8 8 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
4 Citations (Scopus) -
2004
Experimental performance of homothetic mapping for wide field interferometer imaging
van der Avoort, C., van Brug, H., den Herder, J-W., D'Arcio, LA. & Le Poole, R., 2004, In: Proceedings of SPIE- International Society for Optical Engineering. 5491, p. 1587-1597 11 p.Research output: Contribution to journal › Conference article › Scientific › peer-review
2 Citations (Scopus) -
2002
Technological aspects of a custom CMOS sensor for adaptive optics
de Lima Monteiro, DW., Vdovin, GV. & Sarro, PM., 2002, In: Proceedings of SPIE- International Society for Optical Engineering. p. 31-36 6 p.Research output: Contribution to journal › Conference article › Scientific › peer-review