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2006
Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan
Creemer, JF., Zandbergen, HW. & Sarro, PM., 2006, IPC No. P70180NL00, Patent No. 1027025, Priority date 5 May 2006Research output: Patent
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2010
A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
Wei, J., Yue, C., Chen, ZL., Liu, ZW. & Sarro, PM., 2010, In: Journal of Micromechanics and Microengineering. 20, 6, p. 1-8 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access9 Citations (Scopus) -
1999
X-ray spectroscopy measurements with multi-anode saw tooth silicon drift detector
Sonsky, J., Huizenga, J., van Eijk, CWE. & Sarro, PM., 1999, Book of abstracts of the 5th International Conference on Position-Sensitive Detectors, University College London, September 13-17, 1999, United Kingdom. p. 24-24Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2003
Werkwijze voor het uitvoeren van een assay, inrichting daarvoor, alsmede een werkwijze voor het vervaardigen van een inrichting
Iordanov, VP., Sarro, PM., Wolffenbuttel, RF. & Vellekoop, MJ., 2003, IPC No. niet eerder opgenomen, Patent No. 1017989, Priority date 5 Nov 2002Research output: Patent
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2007
Integrated Silicon-polymer laterally stacked actuators for out-of-plane bending motion
Wei, J., Chu Duc, T. & Sarro, PM., 2007, Proc. 18th MicroMechanics Europe (MME 2006). s.n. (ed.). Guimares, Portugal: Univ.of Minho.Ed., p. 187-190 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2008
SENSING MICROGRIPPER WITH PID CONTROL
Phan Huu, P., Nguyen, VQ., Chu Duc, T. & Sarro, PM., 2008, Proc. of 2008 International Conference on Advanced Technologies for Communications. van Ngo, N. & Cheung, NK. (eds.). Hanoi, Vietnam: IEEE Society, p. 319-322 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
2 Citations (Scopus) -
2009
Robust wafer-level thin-film encapsulation of Microstructures using low stress PECVD silicon carbide
Rajaraman, V., Pakula, LS., Pham, HTM., Sarro, PM. & French, PJ., 2009, Proc. IEEE MEMS 2009. Sarro, PM. & Hierold, C. (eds.). Sorrento, Italy: IEEE Society, p. 140-143 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
9 Citations (Scopus) -
2004
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2005
Polarization-insensitive PECVD SiC waveguides for photonic sensing
Pandraud, G., Pham, TMH., Pakula, L., Sarro, PM. & French, PJ., 2005, 17th International Conference on Optical Fibre Sensors. Voet, M., Willsch, R., Ecke, W., Jones, J. & Culshaw, B. (eds.). Bellingham: SPIE, p. 836-839 4 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 5855).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access1 Citation (Scopus) -
2006
Improved Thermal U-beam Actuators for Micro-assembly
Henneken, VA., Tichem, M. & Sarro, PM., 2006, XX Eurosensors. s.l (ed.). Göteborg: Chalmers University of Technology, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2001
Through-wafer copper electroplating for 3-D interconnects
Nguyen, NT., Boellaard, E., Pham, HMT., Kiutchoukov, VG., Cracium, G. & Sarro, PM., 2001, MME 2001: workshop. S.l.: s.n., p. 74-77 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
Through-wafer copper electroplating for three-dimensional interconnects
Nguyen, NT., Boellaard, E., Pham, NP., Kutchoukov, VG., Craciun, G. & Sarro, PM., 2002, In: Journal of Micromechanics and Microengineering. 12, p. 395-399 5 p.Research output: Contribution to journal › Article › Scientific › peer-review
121 Citations (Scopus) -
1999
X-ray Detection With Multi-anode Sawtooth Silicon Drift Detector
Sonsky, J., Huizenga, J., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1999, Book of abstracts of the IEEE 1999 Nuclear Science Symposium and Medical Imaging Conference, October 26-30, 1999, Seattle, USA. p. 9-9Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
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2003
Fabrication of a CMOS compatible vertical accelerometer
Pakula, L., Yang, H., Pham, TMH., Sarro, PM. & French, PJ., 2003, EUROSENSORS 17th European conference on solid-state transducers. s.n. (ed.). Guimarães: University of Minho, p. 635-638 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2006
Optical Nano-hole Arrays for Molecular Recognition and Detection (U-SP-2-I-ICT)
Piciu, OM., van der Krogt, MC., Sarro, PM., Bossche, A. & Docter, MW., 2006, Proceedings of the Asia-Pacific Conference of Transducers and Micro-Nano Technology¿APCOT 2006. s.n. (ed.). s.l.: apcot, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2005
Lateral nano-Newton force-sensing piezoresistive cantilever for micro-particels handling
Chu Duc, T., Creemer, JF. & Sarro, PM., 2005, Proceedings of the 16th MME Micromachining, Micromechanics and Microsystems Workshop 2005. s.n. (ed.). Göteborg, Sweden: MME, p. 268-271 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2008
Finite element modeling and experimental characterization of an electro-thermally actuated silicon-polymer micro gripper
Krecinic, F., Chu Duc, T., Lau, GK. & Sarro, PM., 2008, In: Journal of Micromechanics and Microengineering. 18, 6Research output: Contribution to journal › Article › Scientific › peer-review
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2007
Characterization of a Nozzle-Integrated Capacitive Sensor for Microfluidic Jet Systems
van der Velden, M., Spronck, JW., Munnig Schmidt, RH., Wei, J. & Sarro, PM., 2007, Proc. IEEE Sensors 2007 Conference. Mizaikoff, B. & French, PJ. (eds.). Atlanta, Georgia, USA: IEEE Society, p. 1241-1244 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2011
Mechanical robustness and hermeticity monitoring for MEMS thin film encapsulation
Santagata, F., 2011, 133 p.Research output: Thesis › Dissertation (TU Delft)
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2007
Sub-wavelength apertures in Au/Pd film for fluorescence measurements
Piciu, OM., van der Krogt, MC., Docter, MW., Garini, Y., Young, IT., Sarro, PM. & Bossche, A., 2007, Sub-wavelength apertures in Au/Pd film for fluorescence measurements. s.n. (ed.). Zeist, The Netherlands: Sense of Contact 2009, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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1999
IC-compatible two-level bulk micromachining for RF components
Pham, PN., Ng, TK., Laros, JMW., Scholtes, TLM., Sarro, PM. & Burghartz, JN., 1999, SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]. Utrecht: STW Technology Foundation, p. 359-362 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2012
A novel approach for piezoresistivity characterization of silicon nanowires
Nie, M., Santagata, F., Moh, TSY., Huang, Q-A. & Sarro, PM., 2012, Proc. 11th IEEE Sensors Conference. IEEE Society, p. 1747-1750 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Monocrystalline Si-based microhotplate heater
Mihailovic, M., Creemer, JF. & Sarro, PM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). Veldhoven, The Netherlands: STW, p. 498-501 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2005
ATTO-Liter Periodical Cavities for Optical BIO-Molecular Detection
Piciu, OM., van der Krogt, MC., Docter, MW., Sarro, PM. & Bossche, A., 2005, Proceedings of IEEE Sensors, 2005. s.n. (ed.). Irvine, California, USA: s.l., p. 452-456 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Monitoring enzymatic reactions in nanolitre wells
Young, IT., Moerman, R., van den Doel, LR., Iordanov, VP., Kroon, AR., Dietrich, HRC., van Dedem, GWK., Bossche, A., Gray, BL., Sarro, PM., Verbeek, PW. & van Vliet, LJ., 2003, In: Journal of Microscopy. 212, 3, p. 254-263 10 p.Research output: Contribution to journal › Article › Scientific › peer-review
22 Citations (Scopus) -
2006
Electro-thermally activated polymeric stack for linear in-plane actuation
Lau, GK., Goosen, JFL., van Keulen, F., Chu Duc, T. & Sarro, PM., 2006, Proceedings of the 5th IEEE Conference on Sensors. Sukhan Lee & Masayoshi Esashi (eds.). IEEE Society, p. 538-541 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2002
Fabrication of crystalline membranes oriented in the (111)-plane in a (100) silicon wafer
Venstra, WJ. & Sarro, PM., 2002, MNE 2002. p. 1-2 2 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2000
Anisotropic etching of silicon using a galvanic cell
French, PJ., Ashruf, CMA., Sarro, PM., Kazinczi, R., Xia, XH. & Kelly, JJ., 2000, Abstracts booklet. S.l.: s.n., p. 1-8 8 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2006
Integrated silicon-polymer laterally stacked bender for sensing microgrippers
Chu Duc, T., Wei, J., Sarro, PM. & Lau, GK., 2006, Proceedings of the 5th IEEE Conference on Sensors. Sukhan Lee & Masayoshi Esashi (eds.). IEEE Society, p. 662-665 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2014
Stiction-induced sealing of surface micromachined channels
Morana, B., Poelma, RH., Fiorentino, G., Wei, J., Creemer, JF. & Sarro, PM., 2014, In: IEEE Journal of Microelectromechanical Systems. 23, 2, p. 459-470 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access1 Citation (Scopus) -
1998
Fluorescence detection in (sub)-nano liter microarrays [niet eerder opgevoerd]
van den Doel, LR., Vellekoop, MJ., Sarro, PM., Picioreanu, S., Moerman, R., Frank, H., van Dedem, G., Hjelt, KT. & Young, IT., 1998, ASCI'98: proceedings. BM Haar Romeny, T., DHJ Epema, JFM Tonino & AA Wolters (eds.). Delft: Advanced School for Computing and Imaging, p. 58-62 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Integrated flow-cells for novel adjustable sheath flows
Nieuwenhuis, JH., Bastemeijer, J., Sarro, PM. & Vellekoop, MJ., 2003, In: Lab On a Chip: microfluidic and nanotechnologies for chemistry, biology, and bioengineering. 3, p. 56-61 6 p.Research output: Contribution to journal › Article › Scientific › peer-review
32 Citations (Scopus) -
2005
Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensors arrays
Pham, HMT., de Boer, CR. & Sarro, PM., 2005, Transducers'05. s.n. (ed.). Piscataway: IEEE Society, p. 97-100 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1996
Gases for X-ray detection with microgap chambers
van der Marel, J., Hollander, RW., van Eijk, CWE., van Bogaard, A. & Sarro, PM., 1996, Proceedings of the International Workshop on Micro-Strip Gas Chambers. Contardo, D. & Sauli, F. (eds.). p. 33-38 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
Pressure sensor for harsh environments
Pakula, L., Yang, H., Pham, TMH., French, PJ. & Sarro, PM., 2002, MME'02 micromechanics Europe. Bucharest: Nat. Inst. for Res. and Development in Microtechnoplogies, p. 295-298 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Integrated silicon optical sensors based on hollow core waveguide
Bernini, R., De Nuccio, E., Minardo, A., Zeni, L. & Sarro, PM., 2007, Proc. of SPIE. Kubby, J. A. & Reed, G. T. (eds.). s·l.: Silicon Photonics II, p. 1-14 14 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
14 Citations (Scopus) -
2003
Relative humidity sensors using porous SiC membranes and Al electrodes
Connolly, E., Pham, TMH., Groeneweg, J., Sarro, PM. & French, PJ., 2003, SAFE 2003 Semiconductor advances for future electronics. Utrecht: Stichting voor de Technische Wetenschappen, p. 678-682 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2006
Electrostatically Squeezed Elastometers for Out-Of-Plane Microactuation
Lau, GK., Goosen, JFL., van Keulen, F., Chu Duc, T. & Sarro, PM., 2006, Proceedings Asia-Pacific Conference of Transducers and Micro-Nano Technology. Liu, A.Q. & White, T. (eds.). Singapore: apcot, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2014
Optofluidic hybrid platform with integrated solid core waveguides
Testa, G., Persichetti, G., Sarro, PM. & Bernini, R., 2014, Proceedings of SPIE - Integrated Optics: Devices, Materials and Technologies XVIII. Broquin, JE. & Conti, GN. (eds.). Bellingham, WA, USA: SPIE, p. 1-6 6 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 8988).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access -
2008
Vertical-wall microsieves for nano-particle separation
Shen, C., Pham, HTM. & Sarro, PM., 2008, Proc.Eurosensors XXII. Gerlach, G. (ed.). Verein Deutscher Ingenieure e.V., p. 1357-1360 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Carbon nanotube based heat-sink for solid state lighting
Santagata, F., Almanno, G., Vollebregt, S., Silvestri, C., Zhang, GQ. & Sarro, PM., 2013, 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Zhang, H. (ed.). Piscataway, NJ, USA: IEEE Society, p. 1214-1217 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access3 Citations (Scopus) -
2007
Micro-Electro-Mechanical Actuators Using Confined Polymers
Lau, GK., 2007, Delft: Technische Universiteit Delft. 199 p.Research output: Thesis › Dissertation (TU Delft)
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2008
Advanced 3D Microstructuring for integrated silicon microactuators (plenary
Sarro, PM., 2008, Proc. 19th international symposium on micro-nanomechatronics and human science (MHS 2008). Fukuda, T. & Higuchi, T. (eds.). Nagoya, Japan: IEEE Society, p. 174-179 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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Electrical behaviour of mono-Si based microhotplate heater
Mihailovic, M., Creemer, JF. & Sarro, PM., 2008, The annual workshop on semiconductor advances for future electronics and sensors. s.n. (ed.). Veldhoven, the Netherlands: STW, p. 411-414 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2009
Silicon-based MEMS micro-evaporator
Hao, J., Mihailovic, M., Rops, CM., Creemer, JF. & Sarro, PM., 2009, Proceedings of 20th Micromechanics Europe Workshop (MME). Pons, P. (ed.). Toulouse, France: LAAS-CNRS, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2008
Novel electrothermal bimorph actuator for large out-of-plane displacement and force
Wei, J., Chu Duc, T., Lau, GK. & Sarro, PM., 2008, Proc. IEEE MEMS 2008 Conference. Brand, O. & Zohar, Y. (eds.). s.l.: IEEE Society, p. 46-49 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
9 Citations (Scopus) -
1999
Electron confinement in multi-anode saw tooth silicon drift detectors with an anode pitch of 250 µm1
Sonský, J., Valk, H., Huizenga, J., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1999, In: IEEE Transactions on Nuclear Science. 46, 3, p. 271-274 4 p.Research output: Contribution to journal › Article › Scientific › peer-review
4 Citations (Scopus) -
2010
A piezoresistive sensor for pressure monitoring at inkjet nozzle
Wei, J., ChuDuc, T. & Sarro, PM., 2010, Proceedings IEEE Sensors Conference 2010. Fedder, G. & Kenney, T. (eds.). Piscataway, NJ, USA: IEEE Society, p. 2093-2096 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
11 Citations (Scopus) -
Pulse shear for anaerobic membrane bioreactor fouling control
Yang, J., Spanjers, HLFM. & van Lier, JB., 2010, 12th IWA specialist conference on anaerobic digestion. s.n. (ed.). Guadelajara, Mexico: International Water Association (IWA), p. 1-8 8 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2004
SiC passive optomechanical transducer head for sensor applications
Pandraud, G., Pakula, L., Pham, HMT., French, PJ. & Sarro, PM., 2004, Digest of technical papers; XVIII Eurosensors. Rome: University of Rome, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review