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2007
Monocrystalline Si-based microhotplate heater
Mihailovic, M., Creemer, JF. & Sarro, PM., 2007, SAFE 2007 Semiconductor advances for future electornics. s.n. (ed.). Veldhoven, The Netherlands: STW, p. 498-501 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2005
ATTO-Liter Periodical Cavities for Optical BIO-Molecular Detection
Piciu, OM., van der Krogt, MC., Docter, MW., Sarro, PM. & Bossche, A., 2005, Proceedings of IEEE Sensors, 2005. s.n. (ed.). Irvine, California, USA: s.l., p. 452-456 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Monitoring enzymatic reactions in nanolitre wells
Young, IT., Moerman, R., van den Doel, LR., Iordanov, VP., Kroon, AR., Dietrich, HRC., van Dedem, GWK., Bossche, A., Gray, BL., Sarro, PM., Verbeek, PW. & van Vliet, LJ., 2003, In: Journal of Microscopy. 212, 3, p. 254-263 10 p.Research output: Contribution to journal › Article › Scientific › peer-review
22 Citations (Scopus) -
2006
Electro-thermally activated polymeric stack for linear in-plane actuation
Lau, GK., Goosen, JFL., van Keulen, F., Chu Duc, T. & Sarro, PM., 2006, Proceedings of the 5th IEEE Conference on Sensors. Sukhan Lee & Masayoshi Esashi (eds.). IEEE Society, p. 538-541 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2002
Fabrication of crystalline membranes oriented in the (111)-plane in a (100) silicon wafer
Venstra, WJ. & Sarro, PM., 2002, MNE 2002. p. 1-2 2 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2000
Anisotropic etching of silicon using a galvanic cell
French, PJ., Ashruf, CMA., Sarro, PM., Kazinczi, R., Xia, XH. & Kelly, JJ., 2000, Abstracts booklet. S.l.: s.n., p. 1-8 8 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2006
Integrated silicon-polymer laterally stacked bender for sensing microgrippers
Chu Duc, T., Wei, J., Sarro, PM. & Lau, GK., 2006, Proceedings of the 5th IEEE Conference on Sensors. Sukhan Lee & Masayoshi Esashi (eds.). IEEE Society, p. 662-665 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2014
Stiction-induced sealing of surface micromachined channels
Morana, B., Poelma, RH., Fiorentino, G., Wei, J., Creemer, JF. & Sarro, PM., 2014, In: IEEE Journal of Microelectromechanical Systems. 23, 2, p. 459-470 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access1 Citation (Scopus) -
1998
Fluorescence detection in (sub)-nano liter microarrays [niet eerder opgevoerd]
van den Doel, LR., Vellekoop, MJ., Sarro, PM., Picioreanu, S., Moerman, R., Frank, H., van Dedem, G., Hjelt, KT. & Young, IT., 1998, ASCI'98: proceedings. BM Haar Romeny, T., DHJ Epema, JFM Tonino & AA Wolters (eds.). Delft: Advanced School for Computing and Imaging, p. 58-62 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Integrated flow-cells for novel adjustable sheath flows
Nieuwenhuis, JH., Bastemeijer, J., Sarro, PM. & Vellekoop, MJ., 2003, In: Lab On a Chip: microfluidic and nanotechnologies for chemistry, biology, and bioengineering. 3, p. 56-61 6 p.Research output: Contribution to journal › Article › Scientific › peer-review
32 Citations (Scopus) -
2005
Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensors arrays
Pham, HMT., de Boer, CR. & Sarro, PM., 2005, Transducers'05. s.n. (ed.). Piscataway: IEEE Society, p. 97-100 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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1996
Gases for X-ray detection with microgap chambers
van der Marel, J., Hollander, RW., van Eijk, CWE., van Bogaard, A. & Sarro, PM., 1996, Proceedings of the International Workshop on Micro-Strip Gas Chambers. Contardo, D. & Sauli, F. (eds.). p. 33-38 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
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2002
Pressure sensor for harsh environments
Pakula, L., Yang, H., Pham, TMH., French, PJ. & Sarro, PM., 2002, MME'02 micromechanics Europe. Bucharest: Nat. Inst. for Res. and Development in Microtechnoplogies, p. 295-298 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2007
Integrated silicon optical sensors based on hollow core waveguide
Bernini, R., De Nuccio, E., Minardo, A., Zeni, L. & Sarro, PM., 2007, Proc. of SPIE. Kubby, J. A. & Reed, G. T. (eds.). s·l.: Silicon Photonics II, p. 1-14 14 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
14 Citations (Scopus) -
2003
Relative humidity sensors using porous SiC membranes and Al electrodes
Connolly, E., Pham, TMH., Groeneweg, J., Sarro, PM. & French, PJ., 2003, SAFE 2003 Semiconductor advances for future electronics. Utrecht: Stichting voor de Technische Wetenschappen, p. 678-682 5 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2006
Electrostatically Squeezed Elastometers for Out-Of-Plane Microactuation
Lau, GK., Goosen, JFL., van Keulen, F., Chu Duc, T. & Sarro, PM., 2006, Proceedings Asia-Pacific Conference of Transducers and Micro-Nano Technology. Liu, A.Q. & White, T. (eds.). Singapore: apcot, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2014
Optofluidic hybrid platform with integrated solid core waveguides
Testa, G., Persichetti, G., Sarro, PM. & Bernini, R., 2014, Proceedings of SPIE - Integrated Optics: Devices, Materials and Technologies XVIII. Broquin, JE. & Conti, GN. (eds.). Bellingham, WA, USA: SPIE, p. 1-6 6 p. (Proceedings of SPIE- International Society for Optical Engineering; vol. 8988).Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access -
2008
Vertical-wall microsieves for nano-particle separation
Shen, C., Pham, HTM. & Sarro, PM., 2008, Proc.Eurosensors XXII. Gerlach, G. (ed.). Verein Deutscher Ingenieure e.V., p. 1357-1360 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2013
Carbon nanotube based heat-sink for solid state lighting
Santagata, F., Almanno, G., Vollebregt, S., Silvestri, C., Zhang, GQ. & Sarro, PM., 2013, 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Zhang, H. (ed.). Piscataway, NJ, USA: IEEE Society, p. 1214-1217 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access3 Citations (Scopus) -
2007
Micro-Electro-Mechanical Actuators Using Confined Polymers
Lau, GK., 2007, Delft: Technische Universiteit Delft. 199 p.Research output: Thesis › Dissertation (TU Delft)
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2008
Advanced 3D Microstructuring for integrated silicon microactuators (plenary
Sarro, PM., 2008, Proc. 19th international symposium on micro-nanomechatronics and human science (MHS 2008). Fukuda, T. & Higuchi, T. (eds.). Nagoya, Japan: IEEE Society, p. 174-179 6 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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Electrical behaviour of mono-Si based microhotplate heater
Mihailovic, M., Creemer, JF. & Sarro, PM., 2008, The annual workshop on semiconductor advances for future electronics and sensors. s.n. (ed.). Veldhoven, the Netherlands: STW, p. 411-414 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2009
Silicon-based MEMS micro-evaporator
Hao, J., Mihailovic, M., Rops, CM., Creemer, JF. & Sarro, PM., 2009, Proceedings of 20th Micromechanics Europe Workshop (MME). Pons, P. (ed.). Toulouse, France: LAAS-CNRS, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2008
Novel electrothermal bimorph actuator for large out-of-plane displacement and force
Wei, J., Chu Duc, T., Lau, GK. & Sarro, PM., 2008, Proc. IEEE MEMS 2008 Conference. Brand, O. & Zohar, Y. (eds.). s.l.: IEEE Society, p. 46-49 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific
9 Citations (Scopus) -
1999
Electron confinement in multi-anode saw tooth silicon drift detectors with an anode pitch of 250 µm1
Sonský, J., Valk, H., Huizenga, J., Hollander, RW., van Eijk, CWE. & Sarro, PM., 1999, In: IEEE Transactions on Nuclear Science. 46, 3, p. 271-274 4 p.Research output: Contribution to journal › Article › Scientific › peer-review
4 Citations (Scopus) -
2010
A piezoresistive sensor for pressure monitoring at inkjet nozzle
Wei, J., ChuDuc, T. & Sarro, PM., 2010, Proceedings IEEE Sensors Conference 2010. Fedder, G. & Kenney, T. (eds.). Piscataway, NJ, USA: IEEE Society, p. 2093-2096 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
11 Citations (Scopus) -
Pulse shear for anaerobic membrane bioreactor fouling control
Yang, J., Spanjers, HLFM. & van Lier, JB., 2010, 12th IWA specialist conference on anaerobic digestion. s.n. (ed.). Guadelajara, Mexico: International Water Association (IWA), p. 1-8 8 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2004
SiC passive optomechanical transducer head for sensor applications
Pandraud, G., Pakula, L., Pham, HMT., French, PJ. & Sarro, PM., 2004, Digest of technical papers; XVIII Eurosensors. Rome: University of Rome, p. 1-4 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2012
Monitoring of meniscus motion at nozzle orifice with capacitive sensor for inkjet applications
Wei, J., Yue, C., Zhang, GQ., Dijksman, JF. & Sarro, PM., 2012, Proc. 11th IEEE Sensors Conference. IEEE Society, p. 2172-2175 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3 Citations (Scopus) -
2010
Electrical characterization of TiSi / TiN layer stack in temperature range from 0-500 C
Mihailovic, M., Creemer, JF. & Sarro, PM., 2010, Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. French et al, P. (ed.). Utrecht, The Netherlands: STW, p. 114-117 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2000
Medea projekt T602: Process monitoring and yield management (0.5 um -0.35 um) (promyma) Confidential
Sarro, PM., 2000, Delft: Faculty of Information Technology and Systems, TU Delft.Research output: Book/Report › Report › Scientific
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2014
AlN piezoelectric films for sensing and actuation
Tran, AT., 2014, Delft, The Netherlands. 135 p.Research output: Thesis › Dissertation (TU Delft)
Open Access -
2008
Temperature calibration of fast scan calorimeter chips
Iervolino, E., van Herwaarden, AW. & Sarro, PM., 2008, Proceedings of the conference EUROSENSORS XXII. Gerlach, G. (ed.). Dresden, Germany: Verein Deutscher Ingenieure e.V., p. 773-776 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2003
Conductivity detection for application in capillary electrophoresis microchips
Laugere, FPJ., 2003, s.l.: s.n.. 155 p.Research output: Thesis › Dissertation (TU Delft)
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2015
Dissolved organic nitrogen (DON) during batch denitrification of low concentrations of nitrate using suspended and attached biomass
Brandao, DN., Spanjers, H. & van Lier, JB., 2015, In: Water Science and Technology. 72, 11, p. 1896-1902 7 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access3 Citations (Scopus) -
2006
Piezoresistive cantilever for nano-Newton sensing in two dimensions
Chu Duc, T., Creemer, JF. & Sarro, PM., 2006, Proc. IEEE MEMS 2006 Conference. s.n. (ed.). Istanbul, Turkey: IEEE Society, p. 586-589 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
5 Citations (Scopus) -
2012
Encapsulated aluminum nitride SAW devices for liquid sensing applications
Tran, AT., Pandraud, G., Nie, M., Schellevis, H., Akhnoukh, A., Purniawan, A. & Sarro, PM., 2012, Proc. 11th IEEE Sensors Conference. IEEE Society, p. 604-607 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
7 Citations (Scopus) -
2002
Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
Iordanov, VP., Sarro, PM., Wolffenbuttel, RF. & Vellekoop, MJ., 2002, IPC No. niet eerder gehonnoreerd, Patent No. WO 02/090945 A2, Priority date 14 Nov 2002Research output: Patent
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2013
Heat flux sensor for power loss measurements of switching devices
Iero, D., Della Corte, FG., Fiorentino, G., Sarro, PM. & Morana, B., 2013, Proceedings - 19th international workshop on thermal investigations of ICs and systems. Raad, PE. (ed.). Piscataway, NJ, USA: IEEE Society, p. 327-330 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access10 Citations (Scopus) -
2001
Multi-anode Sawtooth SDD for X-ray Spectroscopy Fabricated on NTD Wafers
Sonsky, J., Hollander, RW., Sarro, PM. & van Eijk, CWE., 2001, In: IEEE Transactions on Nuclear Science. 2001, 48-3, p. 258-261 4 p.Research output: Contribution to journal › Article › Scientific › peer-review
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2021
An engineered heart tissue platform with integrated pacing microelectrodes
Dostanic, M., Windt, L. M., Stein, J. M., van Meer, B. J., Diakou, A., Mummery, C. L., Sarro, P. M. & Mastrangeli, M., 2021. 1 p.Research output: Contribution to conference › Poster › Scientific
Open AccessFile51 Downloads (Pure) -
2006
Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)
French, PJ. & Sarro, PM., 2006, MEMS, A practical guide to design, analysis and applications. Korvinck, JG. & Paul, O. (eds.). Norwich, NY: William Andrew Publishing, p. 805-851 47 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review
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2010
A position and force distribution sensor array for monitoring the contact condition of objects in micro handling
Wei, J., Porta, M., Tichem, M., Staufer, U. & Sarro, PM., 2010, Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems. Suzuki, Y. & Wong, M. (eds.). Los Alamitos, CA, USA: IEEE Society, p. 623-626 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
Open Access3 Citations (Scopus) -
2000
Readout of a LaCl3(Ce3+) Scintillation Crystal with a Large Area Avalanche Photodiode
Allier, CP., Hollander, RW., Sarro, PM., de Boer, M., Czirr, JB. & van Eijk, CWE., 2000, Book of Abstracts of the 2000 IEEE NSS MIC conference, 15-20 October 2000, Lyon, France. p. 63-63Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
2 Citations (Scopus) -
2009
Fast response thermal linear motor with reduced power consumption.
Paalvast, SL., Pham, HTM., Sarro, PM. & Munnig Schmidt, RH., 2009, Proceedings of the Eurosensors XXIII Conference, august 2009. s.n. (ed.). Procedia Chemistry, p. 690-693 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
4 Citations (Scopus) -
1999
Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps
Gennissen, PTJ., Ohji, H., French, PJ., Ashruf, CMA., O Halloran, GMO. & Sarro, PM., 1999, Eurosensors XIII: proceedings [CD-ROM]. M Bartek (ed.). Delft: Delft University of Technology, p. 1029-1032 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
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2010
LPCVD amorphous SiCx for freestanding electron transparent windows
Morana, B., Creemer, JF., Santagata, F., Fan, C. C., Pham, HTM., Pandraud, G., Tichelaar, FD. & Sarro, PM., 2010, Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems. Suzuki, Y. & Wong, M. (eds.). Piscataway, NJ, USA: IEEE Society, p. 572-575 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
3 Citations (Scopus) -
Silicon MEMS for detection of solid and liquid fronts
Wei, J., 2010, Delft. 133 p.Research output: Thesis › Dissertation (TU Delft)
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1999
Recent progress in technology and applications of membrane micromachined deformable mirrors
Vdovin, G., Sarro, PM., Gonté, F., Collings, N. & Dandliker, R., 1999, Proceedings of SPIE, vol. 3760. JD Gonglewski & MA Vorontsov (eds.). Bellingham: International Society for Optical Engineering, p. 2-11 10 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
6 Citations (Scopus) -
2009
Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
Santagata, F., Mele, L., Mihailovic, M., Morana, B., Creemer, JF. & Sarro, PM., 2009, Proceedings of IEEE Sensors 2009 Conference. IEEE Society, p. 799-802 4 p.Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
1 Citation (Scopus)