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2020

Beam displacement and blur caused by fast electron beam deflection

Zhang, L., Garming, M. W. H., Hoogenboom, J. P. & Kruit, P., 2020, In : Ultramicroscopy. 211, 7 p., 112925.

Research output: Contribution to journalArticleScientificpeer-review

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Miniature electron beam separator based on three stacked dipoles

Krielaart, M. A. R., Maas, D. J., Loginov, S. V. & Kruit, P., 2020, In : Journal of Applied Physics. 127, 23, 12 p., 234904.

Research output: Contribution to journalArticleScientificpeer-review

Transmission imaging on a scintillator in a scanning electron microscope

Zuidema, W. & Kruit, P., 2020, In : Ultramicroscopy. 218, 9 p., 113055.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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2 Downloads (Pure)

‘Cleanroom’ in SEM

Jeevanandam, G., van der Meijden, V., Birnie, L. D., Kruit, P. & Hagen, C. W., 2020, In : Microelectronic Engineering. 224, 7 p., 111239.

Research output: Contribution to journalArticleScientificpeer-review

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2019

A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography

Hari, S., Verduin, T., Kruit, P. & Hagen, C. W., 2019, In : Micro and Nano Engineering. 4, p. 1-6

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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1 Citation (Scopus)
71 Downloads (Pure)

Design and simulation of a linear electron cavity for quantum electron microscopy

Turchetti, M., Kim, C. S., Hobbs, R., Yang, Y., Kruit, P. & Berggren, K. K., 2019, In : Ultramicroscopy. 199, p. 50-61

Research output: Contribution to journalArticleScientificpeer-review

Estimating Step Heights from Top-Down SEM Images

Arat, K. T., Bolten, J., Zonnevylle, A. C., Kruit, P. & Hagen, C. W., 2019, In : Microscopy and Microanalysis. 25, 4, p. 903-911 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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1 Citation (Scopus)
13 Downloads (Pure)
Open Access
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1 Citation (Scopus)
91 Downloads (Pure)

Photoemission sources and beam blankers for ultrafast electron microscopy

Zhang, L., Hoogenboom, J. P., Cook, B. & Kruit, P., 2019, In : Structural Dynamics. 6, 5, 051501.

Research output: Contribution to journalArticleScientificpeer-review

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2 Citations (Scopus)
43 Downloads (Pure)

Pulse length, energy spread, and temporal evolution of electron pulses generated with an ultrafast beam blanker

Weppelman, I. G. C., Moerland, R. J., Zhang, L., Kieft, E., Kruit, P. & Hoogenboom, J. P., 2019, In : Structural Dynamics. 6, 2, 12 p., 024102.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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2 Citations (Scopus)
74 Downloads (Pure)

Statistical Coulomb interactions in multi-beam SEM

Stopka, J. & Kruit, P., 2019, In : International Journal of Modern Physics A. 1942021.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Surface effects in simulations of scanning electron microscopy images

Van Kessel, L., Hagen, C. W. & Kruit, P., 2019, In : Journal of Micro/ Nanolithography, MEMS, and MOEMS. 18, 4, 10 p., 044002.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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30 Downloads (Pure)
2018

Brightness measurements of the nano-aperture ion source

Van Kouwen, L. & Kruit, P., 2018, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 36, 6, 06J901.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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2 Citations (Scopus)
54 Downloads (Pure)
Open Access
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11 Citations (Scopus)
26 Downloads (Pure)

Design for an aberration corrected scanning electron microscope using miniature electron mirrors

Dohi, H. & Kruit, P., 1 Jun 2018, In : Ultramicroscopy. 189, p. 1-23 23 p.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Efficient two-port electron beam splitter via a quantum interaction-free measurement

Yang, Y., Kim, C. S., Hobbs, R. G., Kruit, P. & Berggren, K. K., 2018, In : Physical Review A. 98, 4, 043621.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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3 Citations (Scopus)
9 Downloads (Pure)

Grating mirror for diffraction of electrons

Krielaart, M. A. R. & Kruit, P., 2018, In : Physical Review A. 98, 6, 9 p., 063806.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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3 Citations (Scopus)
18 Downloads (Pure)
2017

Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers

Haring, M., Liv Hamarat, N., Zonnevylle, C., Narvaez Gonzalez, A., Voortman, L., Kruit, P. & Hoogenboom, J., 2 Mar 2017, In : Scientific Reports. 7, 43621.

Research output: Contribution to journalArticleScientificpeer-review

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11 Citations (Scopus)
31 Downloads (Pure)
2016

A high-current scanning electron microscope with multi-beam optics

Doi, T., Yamazaki, M., Ichimura, T., Ren, Y. & Kruit, P., 2016, In : Microelectronic Engineering. 159, p. 132-138 7 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Coulomb interactions in sharp tip pulsed photo field emitters

Cook, B. & Kruit, P., 10 Oct 2016, In : Applied Physics Letters. 109, 15, 151901.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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7 Citations (Scopus)
40 Downloads (Pure)

Designs for a quantum electron microscope

Kruit, P., Hobbs, R. G., Kim, C. S., Yang, Y., Manfrinato, V. R., Hammer, J., Thomas, S., Weber, P., Klopfer, B., Kohstall, C., Juffmann, T., Kasevich, M. A., Hommelhoff, P. & Berggren, K. K., 1 May 2016, In : Ultramicroscopy. 164, p. 31-45 15 p.

Research output: Contribution to journalArticleScientificpeer-review

32 Citations (Scopus)

Multi-Beam Scanning Electron Microscope Design

Kruit, P. & Ren, Y., 2016, In : Microscopy and Microanalysis. 22, S3, p. 574-575 2 p.

Research output: Contribution to journalArticleScientificpeer-review

Sensitivity of secondary electron yields and SEM images to scattering parameters in MC simulations

Verduin, T., Lokhorst, S. R., Hagen, C. W. & Kruit, P., 2016, In : Microelectronic Engineering. 155, p. 114-117

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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1 Citation (Scopus)
20 Downloads (Pure)
Open Access
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14 Citations (Scopus)
154 Downloads (Pure)

Transmission electron imaging in the Delft multibeam scanning electron microscope 1

Ren, Y. & Kruit, P., 27 Oct 2016, In : Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 34, 6, 06KF02.

Research output: Contribution to journalArticleScientificpeer-review

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5 Citations (Scopus)
94 Downloads (Pure)
2015

Electron Microscopy of Living Cells During in Situ Fluorescence Microscopy

Liv, N., van Oosten Slingeland, DSB., Baudoin, JP., Kruit, P., Piston, DW. & Hoogenboom, J., 2015, In : ACS Nano (online). p. 1-13 13 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
19 Citations (Scopus)
2014

A large current scanning electron microscope with MEMS-based multi-beam optics

Ichimura, T., Ren, Y. & Kruit, P., 2014, In : Microelectronic Engineering. 113, p. 109-113 5 p.

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Confocal filtering in cathodoluminescence microscopy of nanostructures

Narvaez Gonzalez, AC., Weppelman, IGC., Moerland, RJ., Hoogenboom, JP. & Kruit, P., 2014, In : Applied Physics Letters. 104, 251121 (2014), p. 1-5 5 p.

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Determination of line edge roughness in low-dose top-down scanning electron microscopy images

Verduin, T., Kruit, P. & Hagen, CW., 2014, In : Journal of Micro/Nanolithography, MEMS, and MOEMS. 13, 3, p. 1-10 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Multi-electron-beam deflector array

Zonnevylle, AC., Heerkens, CTH., Hagen, CW. & Kruit, P., 2014, In : Microelectronic Engineering. 123, p. 140-148 9 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Scanning electron microscopy of individual nanoparticle bio-markers in liquid

Liv Hamarat, N., Lazic, I., Kruit, P. & Hoogenboom, JP., 2014, In : Ultramicroscopy. 143, p. 93-99 7 p.

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Semitransparency in interaction-free measurements

Thomas, S., Kohstall, C., Kruit, P. & Hommelhoff, P., 2014, In : Physical Review A (Atomic, Molecular and Optical Physics). 90, 5, p. 0538401-05384010 10 p.

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing

Hari, S., Hagen, CW., Verduin, T. & Kruit, P., 2014, In : Journal of Micro/Nanolithography, MEMS, and MOEMS. 13, 3, p. 1-7 7 p.

Research output: Contribution to journalArticleScientificpeer-review

2013

A large current scanning electron microscope with MEMS-based multi-beam optics

Ichimura, T., Ren, Y. & Kruit, P., 2013, In : Microelectronic Engineering. 113, p. 109-113 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
8 Citations (Scopus)

Cathodoluminescence Microscopy of nanostructures on glass substrates

Narvaez, AC., Weppelman, IGC., Moerland, RJ., Liv, N., Zonnevylle, AC., Kruit, P. & Hoogenboom, JP., 2013, In : Optics Express. 21, 24, p. 29968-29978 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
9 Citations (Scopus)
Open Access
3 Citations (Scopus)

Integration of a high-NA light microscope in a scanning electron microscope

Zonnevylle, AC., van Tol, RFC., Liv, N., Narvaez, AC., Effting, APJ., Kruit, P. & Hoogenboom, JP., 2013, In : Journal of Microscopy. 252, 1, p. 58-70 13 p.

Research output: Contribution to journalArticleScientificpeer-review

38 Citations (Scopus)

Scanning electron microscopy of individual nanoparticle bio-markers in liquid

Liv, N., Lazic, I., Kruit, P. & Hoogenboom, JP., 2013, In : Ultramicroscopy. p. 1-7 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
9 Citations (Scopus)

Simultaneous Correlative Scanning Electron and High-NA Fluorescence Microscopy

Liv, N., Zonnevylle, AC., Narvaez Gonzalez, AC., Effting, APJ., Voorneveld, PW., Lucas, MS., Hardwick, JC., Wepf, RA., Kruit, P. & Hoogenboom, JP., 2013, In : PLoS ONE. 8, 2, p. 1-10 10 p.

Research output: Contribution to journalArticleScientificpeer-review

54 Citations (Scopus)

Two microscopes integrated in one : simultaneous correlative light and electron microscopy

Hoogenboom, JP., Zonnevylle, AC., Liv, N. & Kruit, P., 2013, In : Imaging & Microscopy. 15, 2, p. 30-32 3 p.

Research output: Contribution to journalArticleProfessional

2012

Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams

Jun, DS., Kutchoukov, VG., Heerkens, CTH. & Kruit, P., 2012, In : Microelectronic Engineering. 97, p. 134-137 4 p.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
2011

Electron-Beam-Induced of 3.5 nm Half-Pitch Dense Patterns on Bulk Si

van Oven, J. C., Berwald, F., Berggren, KK., Kruit, P. & Hagen, CW., 2011, In : Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures. 29, 6, p. 1-6 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
40 Citations (Scopus)
11 Citations (Scopus)

Parallel electron-beam-induces deposition using a multi-beam scanning electron microscope

Post, P. C., Mohammadi-Gheidari, A., Hagen, CW. & Kruit, P., 2011, In : Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures. 29

Research output: Contribution to journalArticleScientificpeer-review

Simulation of ion imaging: Sputtering, contrast, noise

Castaldo, V., Hagen, CW. & Kruit, P., 2011, In : Ultramicroscopy. 111, p. 982-994 13 p.

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

The influence of gun design on Coulomb-interactions in a field emission gun

Verduin, T., Cook, BJ. & Kruit, P., 2011, In : Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures. 29, 6

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
2010

Brightness limitations of cold field emitters caused by Coulomb interactions

Cook, BJ., Verduin, T., Hagen, CW. & Kruit, P., 2010, In : Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures. 28, C6C74, p. 1-6 6 p.

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)

'Collapsing rings' on Schottky electron emitters

Bronsgeest, MS. & Kruit, P., 2010, In : Ultramicroscopy. 110, 9, p. 1243-1254 12 p.

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Design of an aberration corrected low-voltage SEM

van Aken, RH., Maas, D. J., Hagen, CW., Barth, JE. & Kruit, P., 2010, In : Ultramicroscopy. 110, 11, p. 1411-1419 9 p.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)